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Toyota DRYPUMP SERIES

Toyota EC100L DryPump Vaccum Pump

Toyota T series DRYPUMP vacuum pump evolution - New full lineup

Toyota Industries Corporation supports motorization of the world as a foundation of the Toyota group. The new T series: integration of know-how cultivated in Semiconductor field and new technologies. Keeping the interchangeability with the previous series, the reliability on harsh process is further improved. Qualified for semiconductor process application with superior performance and reliability.
  • Improvement of byproduct removal for harsh CVD processes
  • Full lineup with variable pumping speed
  • User-friendly, easy to install, operate and control
  • Enviromentally-friendly product with RoHS directive full compliance
Toyota T Series Dry Vacuum Pump - High Reliability
  • Improvement of power handling by adopting new developed rotor
  • Improvement of byproduct removal by optimising N2 purge flow
  • Improvement of restartability after shutdown by increasing the startup torque with motor motion control
  • Precise temperature control to reduce byproduct deposition
Toyota T Series Dry Vacuum Pump - Low Running Cost
  • Adoption of roots technology to minimise power consumption
  • Best-in-class low power consumption due to adoption of high efficiency motor and reduction of mechanical loss
  • Power consumption: 1.7 KW (T1800-H)
Toyota T Series Dry Vacuum Pump - Compact Design
  • Compact and light-weight design by 3D CAD cultivated through automotive technology
  • Best-in-class compact footprint achieving effective utilisation of FAB space
Toyota T Series Dry Vacuum Pump - Quiet & Low Vibration
  • Best-in-class quietness due to adoption of noise reduction technology cultivated through automotive technology
  • Low vibration design suitable for cleanroom environments
Toyota T Series Dry Vacuum Pump - Restriction of Hazardous Substances
  • Environmentally-friendly product with RoHS directive full compliance

Toyota EC100L and Dry Vacuum Pump Specifications


Toyota EC100L Dry Vacuum Pump





Contact us about Toyota EC100L

 Toyota EC100L dry vacuum pumps

EC100L - LoadLock/Transfer - PVD

T100P-H – SEM – Loadlock/Transfer – PVD – ASHER – ETCHER – IMPLANT – LP CVD - P-CVD

Specification

Vacuum pump name

Unit

EC100L

Application


Light process

Maximum pumping speed

m3/h

100

Maximum pumping speed

L/min

1670

Ultimate pressure

Pa

0.67

Inlet flange


NW50

Outlet flange


NW25

Power consumption at ultimate pressure

kW

0.55

Dimension (L x H x W)

mm

590 x 300 x 280

Weight

Kg

107

Sound level at ultimate pressure

dB(A)

<55

Cooling water - Connector

Inch

¼

Cooling water - Flow rate

L/min

>1.5

Cooling water – Supply pressure

kPaG

300~700

Cooling water - Temperature

°C

10~25

N2 purge - Connector

Inch

-

N2 purge – Flow rate

slm

-

N2 purge – Duct static pressure

kPaG

-

Secondary evacuation – Connector

mm

-

Secondary evacuation – Flow rate

m3/min

-

Secondary evacuation – Duct static pressure

PaG

-

Power supply – Max, Power supply

kVA

4.6

Power supply – Phase/Voltage frequency


3 phase 208V (Note3)/50 60Hz

Environment – Ambient temperature

°C

15~30

Toyota EC100L and T100P-H dry vacuum pumps

Note1) N2 purge 0 slm Note2) N2 purge 35 slm Note3) Fluctuation allowance ± 10%