Toyota DRYPUMP SERIESToyota T series DRYPUMP vacuum pump evolution - New full lineupToyota Industries Corporation supports motorization of the world as a foundation of the Toyota group. The new T series: integration of know-how cultivated in Semiconductor field and new technologies. Keeping the interchangeability with the previous series, the reliability on harsh process is further improved. Qualified for semiconductor process application with superior performance and reliability.
- Improvement of byproduct removal for harsh CVD processes
- Full lineup with variable pumping speed
- User-friendly, easy to install, operate and control
- Enviromentally-friendly product with RoHS directive full compliance
Toyota T Series Dry Vacuum Pump - High Reliability
- Improvement of power handling by adopting new developed rotor
- Improvement of byproduct removal by optimising N2 purge flow
- Improvement of restartability after shutdown by increasing the startup torque with motor motion control
- Precise temperature control to reduce byproduct deposition
Toyota T Series Dry Vacuum Pump - Low Running Cost
- Adoption of roots technology to minimise power consumption
- Best-in-class low power consumption due to adoption of high efficiency motor and reduction of mechanical loss
- Power consumption: 1.7 KW (T1800-H)
Toyota T Series Dry Vacuum Pump - Compact Design
- Compact and light-weight design by 3D CAD cultivated through automotive technology
- Best-in-class compact footprint achieving effective utilisation of FAB space
Toyota T Series Dry Vacuum Pump - Quiet & Low Vibration
- Best-in-class quietness due to adoption of noise reduction technology cultivated through automotive technology
- Low vibration design suitable for cleanroom environments
Toyota T Series Dry Vacuum Pump - Restriction of Hazardous Substances- Environmentally-friendly product with RoHS directive full compliance
Toyota EC100L and Dry Vacuum Pump Specifications
Toyota EC100L Dry Vacuum Pump
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EC100L
- LoadLock/Transfer - PVD
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T100P-H
– SEM – Loadlock/Transfer – PVD – ASHER – ETCHER –
IMPLANT – LP CVD - P-CVD
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Specification
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Vacuum
pump name
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Unit
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EC100L
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Application
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Light
process
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Maximum
pumping speed
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m3/h
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100
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Maximum
pumping speed
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L/min
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1670
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Ultimate
pressure
|
Pa
|
0.67
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Inlet
flange
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|
NW50
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Outlet
flange
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NW25
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Power
consumption at ultimate pressure
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kW
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0.55
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Dimension
(L x H x W)
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mm
|
590
x 300 x 280
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Weight
|
Kg
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107
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Sound
level at ultimate pressure
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dB(A)
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<55
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Cooling
water - Connector
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Inch
|
¼
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Cooling
water - Flow rate
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L/min
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>1.5
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Cooling
water – Supply pressure
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kPaG
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300~700
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Cooling
water - Temperature
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°C
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10~25
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N2
purge - Connector
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Inch
|
-
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N2
purge – Flow rate
|
slm
|
-
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N2
purge – Duct static pressure
|
kPaG
|
-
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Secondary
evacuation – Connector
|
mm
|
-
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Secondary
evacuation – Flow rate
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m3/min
|
-
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Secondary
evacuation – Duct static pressure
|
PaG
|
-
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Power
supply – Max, Power supply
|
kVA
|
4.6
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Power
supply – Phase/Voltage frequency
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3
phase 208V (Note3)/50 60Hz
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Environment
– Ambient temperature
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°C
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15~30
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Note1) N2 purge 0 slm Note2) N2 purge 35 slm Note3) Fluctuation allowance ± 10%
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