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Pumping Speed
Of the numbers used to characterize a vacuum system, pumping speed is the most
fundamental. Unfortunately, it is a common mistake to accept the pump manufacturer's
quoted pumping speed as if it were the effective pumping speed from the
chamber. This error
is easily exposed. Think of two identical pumps and chambers: one set is connected
via a short, wide-diameter tube; the other is connected by a long, narrow tube.
Which arrangement pumps the chamber faster and why?
From the first great principle, 'vacuum doesn't suck', we know that gas molecules
enter the pumping mechanism via a series of random collisions with each other
and with chamber walls. The narrower the tube, the lower the probability that
a molecule will enter it. The longer the tube, the greater the chance of the molecule
hitting a wall while passing through. But molecules, unlike light, do not bounce
off walls at the same angle as they arrive. They are just as likely to bounce
backward as forward.
That is, the shorter, wider connection gives the faster pump-down, since its higher
conductance leads to a higher effective pumping speed from the chamber.
| Effective Pumping Speed If
we attach a 500 L/s pump to a chamber with a 500 L/s conductance port, what is
the effective pumping speed (EPS) from the chamber. Before calculating, let us
set some limits intuitively: - A
500L/s pump is connected to the chamber by some magical 'infinite' conductance
port, would the pump's pumping speed be affected?
Answer - No. EPS is 500 L/s
- Two
500L/s pumps are connected to the same chamber by separate, 'infinite' conductance
ports, what is the EPS?
Answer
- EPS is 1000 L/sec. - A
500L/s pump is connected to the chamber by a 500L/sec port, would the EPS be higher
or lower than 500L/sec?
Answer
- Lower. This
indicates that adding pumping speed and conductance in series lowers the overall
pumping speed, while adding them in parallel increases the pumping speed. This
sounds identical to the series/parallel connections of electrical capacitances.
Indeed, pumping speeds (PS) and conductances (C) are added to give effective pumping
speed (EPS) using exactly the same mathematic form as capacitances. To calculate
series connection of chamber and pump noted above: 1/EPS
= 1/PS + 1/C
Substituting
the numbers from our initial example, we find 1/EPS = 1/500 + 1/500 1/EPS
= 2/500 1/EPS = 1/250 EPS
= 250 liter per sec That is, when the pumping speed and conductance are of
equal value, the effective pumping speed is half the quoted pumping
speed. Newcomers to vacuum technology, and even some old-timers, are surprised
by this number. Adding other components only worsens the problem. For example, what if we put
an LN2 trap with 500L/sec conductance between the port and pump?
1/EPS = 1/500 + 1/500 + 1/500
1/EPS = 3/500 1/EPS = 1/167 EPS
= 167 liter per sec
Clearly, using the quoted PS as the effective PS will cause serious errors in
estimating base pressure and pump down time. Now, we will take the ridiculous situation and connect a 2000L/sec pump to a chamber
by a tube with 10L/sec conductance and calculate the EPS. 1/EPS = 1/2000 + 1/10
1/EPS = 201/2000 1/EPS = 1/9.95 EPS
= <10 liter per sec
| ConclusionsOne
critical fact should be extracted from this segment. The effective pumping speed
never exceeds the value of the minimum conductance (or pumping speed) of
the individual parts that are stacked together. Expressed differently, if one
component in the stack has a 10L/sec conductance, the effective pumping speed
cannot exceed 10L/sec even if a 2,000,000L/sec pump is attached to it! (Remember
- vacuum doesn't suck!
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