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Vacuum valves: Edwards (formely known as BOC Edwards) vacuum valves

Edwards GV Manual and Pneumatic Gate Valves

Edwards vacuum valves - overview
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Edwards GV Manual and Pneumatic Gate Valves

In situ removal of gate and linkage mechanism for easy servicing
Virtual leaks eliminated due to vacuum brazed manufacture
Electropolished finish inside and outside
Compact design with high conductance
Manual design with high conductance
Manual or pneumatic options
Microswitch position indicator as standard on pneumatic version
Reedswitch variants
long periods of use between maintenance
Low vibration and shock
Free choice of orientation
Wide range from 40mm / 1.56 in bore up to 320mm / 12.48 in bore
Flange options – ISO, ASA or CF (metal sealed)

The Edwards (Formerly BOC Edwards) GV range of stainless steel, bellows sealed gate valves is designed for applications requiring overall leak tightness and a minimum of hydrocarbon in the residual atmosphere.

These superior quality valves offer high vacuum integrity coupled with maximum conductance. The valves are available with flange options of ISO, ANSI or CF (Metal sealed) for applications at ultra high vacuum requiring increased bakeout temperatures.

The stainless steel valve bodies are vacuum brazed, a special process which includes a bakeout at 1100 °C. This eliminates any possibility of virtual leaks and ensures a product with low outgassing characteristics.

A laser welded stainless stee bellows effectively seals the actuator from the valve. The concept provides ease of servicing and allows the gate and linkage mechanism to be removed while the valve remains in situ.

Technical data - Edwards GV Manual and Pneumatic Gate Valves

Pressure range: <10-9 mbar to 1 bar (absolute)

<8 x 10-10 – 750 Torr

Leak rate <10-9 mbar | s-1

<8 x 10-9 Torr | s-1

Operating pressure range: 10-7 – 2000 mbar / 8 x 10 -8 – 1500 Torr

Maximum differential pressure on the valve plate:

1 bar / 750 Torr in either direction

Maximum differential pressure on the valve plate at opening:

20 mbar / 15 Torr

Position indicator switch, breaking capacity: 24 V d.c. 5 A

Material of construction:

Body, valve plate: AISI 304 stainless steel

Mechanism: AISI 304 stainless steel

Bearings: Hardened high carbon chrome steel

Circlips: SS PH 15-7 Mo

Bellows: AM 350 SS

Seals, valve plate:

Bonnet

Metal sealed valves: OFHC

Other valves: Fluoroelastomer

Bakeout temperatures

Valve body, valve open: 150 °C

Valve body, valve open: 250°C

Valve closed: 200°C

Actuator, manual: 200°C

Actuator, pneumatic: 100°C

Average life until first service*: 100000 closures

Mounting position: Any orientation

Pneumatic operating pressure: 2-5.5 bar / 60 -80 psi

* Dependent on the vacuum environment and the opening and closing speed

Flange Bore

Conductance in high vacuum

Pneumatic valve minimum closing & Opening time at 5 bar

Approx weight

|s-1

seconds

100

160

200

250

320

1.5

2.5

130

250

520

2000

6300

15000

23000

39000

0.5

1.5

2 (close)

3 (open)

3 (close)

4 (open)

3 (close)

4 (open)

Edwards GV Manual and Pneumatic Gate Valves

BODY DIMENSIONS (mm)

Edwards GV Manual and Pneumatic Gate Valves

FLANGE DIMENSIONS (mm)

Model

ØD

ØM

ØN

ØS

ØT*

GVI 040

GVI 050

84.1

96.8

26.2

75.2

50.5

69.3

50.7

86.1

104.5

33.0

37.6

33.0

37.6

134.9

91.7

55.0

75.0

38.1

50.8

41.2

52.2

12.7

ISO

GVI 063

GVI 100

GVI 160

GVI 200

GVI 250

GVI 320

111.0

177.8

222.3

285.8

341.8

408.2

89.4

143.5

191.8

254.5

303.5

362.7

51.6

61.2

67.0

80.0

69.3

93.5

120.4

50.7

76.2

120.4

122.1

260.4

270.5

353.4

460.4

560.5

43.1

66.9

87.6

114.6

146.6

174.9

43.1

66.9

87.6

114.6

146.6

174.9

134.9

175.6

240.7

31.7

201.3

231.7

130.1

165.1

225.0

285.8

335.0

425.0

63.5

101.6

152.4

203.2

254.0

304.8

110.0

145.0

200.0

260.0

310.0

395.0

M10

M12

12.7

16.0

15.9

19.0

ANSI

GVA 020

GVA 025

GVA 040

GVA 060

GVA 080

GVA 100

GVA 120

96.8

111.0

177.8

222.3

285.8

341.4

403.2

75.2

89.4

143.5

191.8

254.5

303.5

362.7

51.6

61.2

70.3

80.0

50.8

75.9

88.9

88.8

69.3

93.5

120.4

50.7

76.2

101.6

104.5

122.1

206.4

270.5

353.4

460.6

560.5

37.6

43.1

66.9

87.6

114.6

146.6

174.9

134.9

175.6

240.7

91.7

190.6

200.2

231.7

151.6

228.4

279.4

406.4

50.8

63.5

101.9

152.4

203.3

254.0

304.8

120.7

192.8

241.3

362.0

3/8 – 16

¾ – 10

¾ - 10

12.7

19.2

19.1

GVC 015

GVC 020

GVC 025

GVC 040

GVC 060

GVC 080

GVC 100

GVC 120

84.1

96.8

111.0

177.8

222.3

285.8

341.4

403.2

62.5

75.2

89.4

143.5

191.8

254.5

303.5

362.7

51.6

57.9

61.2

75.4

80.5

85.1

98.8

98.7

50.8

75.9

88.9

69.3

93.5

120.4

50.7

76.2

240.7

86.1

104.5

122.1

206.4

270.5

353.4

460.6

560.5

33.0

37.6

43.1

66.9

87.6

114.6

146.6

174.9

134.9

175.6

240.7

91.7

190.6

200.2

231.7

69.3

85.7

113.5

151.6

202.4

253.2

304.8

354.6

38.1

50.8

63.5

101.9

152.4

203.2

254.0

304.8

58.7

72.4

92.2

130.3

181.1

231.9

284.0

325.4

M10

12.7

15.9

17.5

19.8

22.4

24.6

28.5

* For the ANSI flange valves, the dimensions given define the diameter of the flange holes in inches and the pitch of the screw thread. For example, 3/8-16 denotes a hole diameter of ¾ inch and a pitch of 16 threads per inch.

Edwards GV Manual and Pneumatic Gate Valves

Ordering information - Edwards GV Manual and Pneumatic Gate Valves

Edwards GV Manual and Pneumatic Gate Valves

Ordering information

Type

Model

Flange Seals

No. Seals*

Fixing Kit

No. Kits**

ISO

GVI 063

GVI 100

GVI 160

GVI 200

GVI 250

GVI 320

B27158165

B27158181

B27158172

B27158081

B27158143

B27158166

B22417187

B22417217

B22417247

GVC

C10001290

C10005290

C10007490

C10009290

C10011290

C10012290

C10012390

B22417157

B22417187

B22417188

B22417189

B22417190

Number of seals in each pack
** Number of fixing kits that are needed to mount both flanges of the valve

For semiconductor applications, Edwards (formerly BOC Edwards) recommend the use of ISO trapped 'O' rings.

Edwards GV Manual and Pneumatic Gate Valves

Ordering Information

Nominal

Valve Ordering Number

For valves manufactured 1996 and onwards

Type

Flange

Bore

mm/In

Model

Seals kits

Bellows kits

Pins and bearing kits

ISO Manual

NW40

NW50

ISO63

ISO80

ISO100

ISO160

ISO200

ISO250

ISO320

40 / 1 ½

50 / 2

63 / 2 ½

75 / 3

100 / 4

160 / 6

200 / 8

250 / 10

320 / 12

GVI040

GVI050

GVI063

GVI080

GVI100

GVI160

GVI200

GVI250

GVI320

B65001000

B65101000

B65201000

No3933800

B65301000

B65401000

B65501020

B65301000

B65701000

B65001020

B65101020

B65201020

please call

B65301020

B65401020

B65501020

B65301020

B65701020

B65001030

please call

B65301030

B65601030

B65001050

B65101040

B65201040

please call

B65301040

B65401040

B65501040

B65601040

B65701040

ISO Pneumatic

NW40

NW50

ISO63

ISO63*

ISO80

ISO100

ISO100*

ISO160

ISO160*

ISO200

ISO250

ISO320

40 / 1 ½

50 / 2

63 / 2 ½

75 / 3

100 / 4

160 / 6

200 / 8

250 / 10

320 / 12

GVI040

GVI050

GVI063

GVI080

GVI100

GVI160

GVI200

GVI250

GVI320

B65051000

B65151000

B65251000

U65254000

B65351000

B65354000

B65451000

B65454000

B65551000

B65651000

B65751000

B65001020

B65101020

B65201020

please call

B65301020

B65401020

B65501020

B65601020

B65701020

B65001030

B65201030

please call

B65301030

B65401030

B65301030

B65601030

B65001040

B65101040

B65201040

please call

B65301040

B65401040

B65501040

B65601040

B65701040

ANSI Manual

2 in ANSI

4 in ANSI

6 in ANSI

10 in ANSI

50 /2

63 / 2 ½

100 / 4

160 / 6

200 / 8

250 / 10

320 / 12

GVA020

GVA025

GVA040

GVA060

GVA080

GVA100

GVA120

B65102000

B65202000

B65302000

B65402000

B65502000

B65602000

B65702000

B65101020

B65201020

B65301020

B65402010

B65501020

B65301020

B65701020

B65001030

B65301030

B65601030

B65101040

B65201040

B65301040

B65401040

B65501040

B65601040

B65701040

ANSI Pneumatic

2 in ANSI

4 in ANSI

6 in ANSI

10 in ANSI

50 /2

63 / 2 ½

100 / 4

160 / 6

200 / 8

250 / 10

320 / 12

GVA020

GVA025

GVA040

GVA060

GVA080

GVA100

GVA120

B65152000

B65252000

B65352000

B65452000

B65552000

B65652000

B65752000

B65101020

B65201020

B65301020

B65401020

B65501020

B65601020

B65701020

B65001030

B65301030

B65601030

B65101040

B65201040

B65301040

B65401030

B65501030

B65601030

B65701030

CF Manual

2.37 in od CF

3.37 in od CF

4.47 in od CF

6.00 in od CF

8.00 in od CF

10.00 in od CF

12.00 in od CF

14.00 in od CF

40/1 ½

50/2

63/2 ½

100/4

160/6

200/8

250/10

320/12

GVC015

GVC020

GVC025

GVC040

GVC060

GVC080

GVC100

GVC120

B65003000

B65103000

B65203000

B65303000

B65403000

B65503000

B65603000

B65703000

B65003020

B65103020

B65203020

B65303020

B65403020

B65503030

B65603030

B65703030

B65003030

B65103030

B65203030

B65303030

B65403030

B65503030

B65603030

B65703030

B65001040

B65101040

B65201040

B65301040

B65404040

B65504040

B65604040

B65704040

CF Pneumatic

2.37 in od CF

3.37 in od CF

4.47 in od CF

6.00 in od CF

8.00 in od CF

10.00 in od CF

12.00 in od CF

14.00 in od CF

40/1 ½

50/2

63/2 ½

100/4

160/6

200/8

250/10

320/12

GVC015

GVC020

GVC025

GVC040

GVC060

GVC080

GVC100

GVC120

B65053000

B65153000

B65253000

B65353000

B65453000

B65553000

B65653000

B65753000

B65003030

B65103030

B65203030

B65303030

B65403030

B65503030

B65603030

B65703030

B65003030

B65103030

B65203030

B65303030

B65403030

B65503030

B65603030

B65703030

B65001040

B65101040

B65201040

B65301040

B65401040

B65501040

B65601040

B65701040

Seal kits contain: gate 'O' ring, bonnet seal and set of pneumatic actuator rings. Bellows kits contain: bonnet/bellows/actuator link welded assembly, and circlips (as required). Pins and bearings kits contain: pins, washers, bearings, springs and as required, wheels.