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Vacuum valves: Edwards (formely known as BOC Edwards) vacuum valves

Edwards SIPVP Soft-Start Isolation Valves

Edwards vacuum valves - overview
Edwards SP Speedivalve manual operation isolation valves - NW flanges | Edwards SP manual operation isolation valves - NPT and BSP
Edwards IBV series vacuum ball valves | Edwards PVMK manual operation isolation valves | Edwards PVPK pneumatic operation isolation valves
Edwards PVEK solenoid isolation valves | Edwards LCPVEK solenoid isolation valves | Edwards SIP VP soft start isolation valves
Edwards BRV backing/roughing valves | Edwards GV manual & pneumatic gate valves | Edwards GVA/AVA Aluminium gate/angle valves
Edwards industrial quarter swing butterfly valve | Edwards QSB quarter swing butterfly valves | Edwards electroneumatic valves
Edwards AV5A air admit valve | Edwards AV10K air admit valve | Edwards IPVA10EK solenoid air admit valve
Edwards LV10K fine control needle valve | Edwards FCV10K fine control needle valve

Soft start, pneumatically operated valves with interchangeable orifices for the controlled pumpdown of processes where turbulent flow can cause problems with particulate contamination.

MTTF of 5000000 cycles
Controlled pump down to match process
Aluminium bodies
100% grease free vacuum
Available in two sizes, with NW25 or NW 40 flanges
Fast acting valves in the event of power failure
Bellows sealed for clean operation
Easy to service with replaceable orifices
Supplied with 5mm, 6mm and 7mm interchangeable orifces
Bakeable to 100°C to prevent condensation of process gases

Edwards SIPVP Soft-Start Isolation Valves

The valve is designed to reduce turbulence which could result in disturbance of particulates in the system which , in semiconductor manufacturing processes, then deposit on the wafer causing high reject rates.

When the slave valve is opened gas flows at a low rate between the two sides of the valve through interchangeable orifices allowing slow pumping. Having reached a predetermined pressure level specified by the user, the master valve is opened by means of a user supplied signal allowing full bore pumping.

The bellows sealed valves are single acting with pneumatic opening and spring closure. They are supplied with three interchangeable orifices to enable pumping characteristics to be matched to the customers process. A microswitch is supplied as standard to indicate valve status. Both the valve and the microswitch can be baked to 100°C to speed up degassing, and to prevent process gases from condensing inside the valve.

While designed primarily for the semiconductor industry the valve will be of interest to other vacuum users requiring controlled pump down.

Edwards SIPVP Soft-Start Isolation Valves

Technical data - Edwards SIPVP Soft-Start Isolation Valves

Time to open/Close at 4 bar (ms): SIP25P SIP40P

Slave valve 60/20 60/20

Master valve 15/41 50/155

weight: 920/32 1760/62

Edwards SIPVP Soft-Start Isolation Valves Dimensions in mm
Valve	A	B	C	D	E	F
LCPV16EK	50	161.9	50.8	68.2	25.8	144.3
LCPV25EK	65	192.2	76.2	68.2	38.2	174.6

Edwards SIPVP Soft-Start Isolation Valves Dimensions in inches
Valve	A	B	C	D	E	F
LCPV16EK	1.95	6.31	1.98	2.66	1	5.63
LCPV25EK	2.54	7.49	2.97	2.66	1.49	6.81

Ordering information - Edwards SIPVP Soft-Start Isolation Valves

Product description

Ordering Number

SIPV25P

SIPV40P

C41624000

C41644000