Inlet flange size
Backing port size
Pumping speed
N2
H2
Compression ratio
N2
H2
Ultimate pressure
Maximum allowable backing pressure
Maximum allowable gas flow*1
N2 (water-cooled only)
Ar (water-cooled only)
Rated speed
Run-up time to 90% rated speed
Mounting position
Water Cooling
Flow
Temperature
Pressure
Recommended purge gas flow N2
Input voltage
Maximum input power (without TMS)
Weight - pump/controller
| VG300
KF40
3800 l s-1
2500 l s-1
>108
6 x 103
10-7 (10-9) order Pa (mbar)
266 (2.66) Pa (mbar)
2800 (4.73) sccm (Pa m3 s)
2150 (3.63) sccm (Pa m3 s)
24000 rpm
12 minutes
Any orientation
3 liters / minute
5-25 (41-77) °C (°F)
3 cm2 / Kgf
50 (8.4 x 10-2) sccm (Pa m3 s)
200 to 240 V a.c. (±10%)
1.5 kVA
105 (231.48) kg (lb)
12 (26.46) kg (lb) | ISO320F
KF40
4000 l s-1
2500 l s-1
>108
6 x 103
10-7 (10-9) order Pa (mbar)
266 (2.66) Pa (mbar)
2800 (4.73) sccm (Pa m3 s)
2150 (3.63) sccm (Pa m3 s)
24000 rpm
12 minutes
Any orientation
3 liters / minute
5-25 (41-77) °C (°F)
3 cm2 / Kgf
50 (8.4 x 10-2) sccm (Pa m3 s)
200 to 240 V a.c. (±10%)
1.5 kVA
105 (231.48) kg (lb)
105 (231.48) kg (lb)
| VG350
KF40
4300 l s-1
2500 l s-1
>108
6 x 103
10-7 (10-9) order Pa (mbar)
266 (2.66) Pa (mbar)
2800 (4.73) sccm (Pa m3 s)
2150 (3.63) sccm (Pa m3 s)
24000 rpm
12 minutes
Any orientation
3 liters / minute
5-25 (41-77) °C (°F)
3 cm2 / Kgf
50 (8.4 x 10-2) sccm (Pa m3 s)
200 to 240 V a.c. (±10%)
1.5 kVA
97 (213.85) kg (lb)
105 (231.48) kg (lb)
|
