Edwards® Vacuum - Turbo pumps and accessories
EXT turbomolecular pumps
EXT75DX compound turbomolecular pump
EXT255DX compound turbomolecular pump
EXT255H compound turbomolecular pump
EXT406PX compound turbomolecular pump
EXT556H compound turbomolecular pump
Turbomolecular pump controllers
Edwards Vacuum: EXC controllers
Edwards Vacuum: TIC turbo controller
Edwards: TIC turbo & instrument controller
EXT accessories
Edwards EXT accessories
EXT pump to controller cable
EXT ACX air-cooler
EXT BX bakeout band
EXT PRX10 purge-restrictor
EXT TAV vent-valve
EXT Vent-port adaptor
EXT Vibration isolator
EXT VRX vent-restrictor
EXT turbo pump spares
EXPT combined outfits
Edwards EXPT 1 &2 pumping stations
STP magnetically levitated turbomolecular pumps and accessories
Edwards Vacuum - STP turbo pumps
STP-XA4503C turbomolecular pump
STP-iX455 turbomolecular pump
STP301/STP301C turbomolecular pump
STP-L301/STP-L301C turbomolecular pump
STP603/STP603C turbomolecular pump
STP1003/STP1003C turbomolecular pump
STPH301C high performance turbo pump
STPH451C high performance turbo pump
STPA803C "advantage" turbo pump
STPA1303C "advantage" turbo pump
STPA1603C turbomolecular pump
STPA2203C "advantage" turbo pump
STP-XA2703C turbo pump
STP-XA3203C turbo pump
Edwards® turbo molecular pumps (turbo vacuum pumps) overview, information and definitions
A turbomolecular pump (TMP)
A compound molecular pump (CMP)
Turbo vacuum pumps - pumping speed
Turbo vacuum pumps - quiescent electrical power
Turbo vacuum pumps - compression ratio
Turbo vacuum pumps - ultimate pressure
Turbo vacuum pumps - bearing and suspension
Turbo vacuum pumps - rotor
Turbo vacuum pumps - motor
Turbo vacuum pumps - corrosive applications
Turbo vacuum pumps - purge port
Turbo vacuum pumps - venting
Turbo vacuum pumps - inlet screen
Turbo vacuum pumps - cooling
Turbo vacuum pumps - scope of supply | Edwards® Vacuum - STP-iX455 turbomolecular pump
- The STP-iX455 turbomolecular pump
- Integrated controller employs an innovative magnetic bearing system
- Magnetic bearing system reduces vibration by 50%
- Well suited for use with electron microscopes
- Well suited for use with metrology systems
- Well suited for use with lithography systems where low vibration is
critical to the application.
- Well suited for use with to a wide range of
PVD, ALD, Etch and curing processes.
- STP-iX455 operates on 48 V d.c.
eliminating the need for a conventional rack-mounted control unit and
connection cable.
Edwards® Vacuum - STP-iX455 turbomolecular pump
Technical Specification - Features
- Innovative New Magnetic Bearing System
- •New concept self-sensing MB technology enables significantly reduced pump vibration and cuts down magnetic fields leakage
- •Digital 5-axis magnetic bearing control provides stability to external
- vibration or impact
- Compact Design
- •Integrated controller eliminates the bulky controller cable and conventional rack mounted control unit
- •Operates with 48 V d.c. only
- •Ambient Cooling (optional fan accessory for high gas throughput applications)
- Low Vibration
- •AVR (Auto Vibration Reduction) minimizes the rotate system vibration during acceleration
- •ABS (Auto Balancing System) equipped as standard
- Reliability
- •Reliable 5 axis maglev technology
- •Warning and maintenance functions
- Certifications
- •Conforms to international safety standards
- •CE marked, UL listed SEMI compliant
Edwards® Vacuum - STP-iX455 turbomolecular pump Pumping speed
(pumping speed vs inlet pressure)
Edwards® Vacuum - STP-iX455 turbomolecular pump Compression ratio
(compression ratio CR vs backing pressure)
Edwards® Vacuum - STP-iX455 turbomolecular pump Dimensions
Edwards® Vacuum - STP-iX455 turbomolecular pump Technical data
Inlet flange size ISO100K/DN100CF
Pumping speed
N2 300 l s-1
H2 300 l s-1
Inlet flange size ISO160K/DN1600CF
Pumping speed
N2 450 l s-1
H2 460 l s-1
Compression ratio
N2 >108
H2 >1 x 104
Ultimate pressure
DN Flange
10-8 order Pa
ISO Flange
6.5 x 10-6 order Pa
Maximum working pressure
1.3 x 10-1 Pa
Allowable backing pressure
67 Pa
Rated speed
55000 rpm
Starting time
<6 min
Mounting position
Any orientation
Cooling Method
Natural air cooling(air cooling when baking and gas pumping)
Lubricating oil
not necessary
Backing pump
240 l min-1
Leakage Magnetic Flux
Axial direction
<100 m Gauss
Radial direction
<100 m Gauss
Ambient temperature range
0 to 40 ºC
Storage temperature range
-25 to 55 ºC
Weight
15 kg / 16 kg
Edwards® Vacuum - STP-iX455 turbomolecular pump Optional accessory
Optional accessories A number of accessories are available to meet optimum configuration in
each application.
Edwards® Power supply unit iPS-240
This is a power supply unit for operation from 100-200 V a.c. power
source.
- •STP-Link communication port on the front panel
- •Possible to dock with the iDT-001 display unit and becomes an integrated power supply with an LCD display.
Edwards® Vacuum - Power supply unit iPS-240 Technical data
Input voltage
100-240 V a.c.
Input power Max
300 VA
Input frequency
50/60 Hz
Inrush current
<40 A
Leakage current
<1.0 mA
Output voltage
48 ± 2 V d.c.
Rated output current
5 A
Over-voltage protection
55.2-64.8 V d.c.
Over-current protection
Output fuse (7A, Fast-blow type)
Withstand voltage
Between input and FG: 1500 V a.c., 1 min between input and output: 2300 V a.c., 1 min (current limit: 20 A)
Allowable ambient temperature
0 to 40 ºC
Storage temperature
-20 to 55 ºC
Mass
3 kg
Edwards® Vacuum - STP-iX455 turbomolecular pump Display unit iDT-001
This is a handy terminal display and manual control unit for visual
feedback of performance and for direct control of the pump.
- • A plug-and-play unit connecting with the STP-iX455 or iPS-240
- • Docking connection available with the iPS-240
- • Displays operational status on the LCD panel
Edwards® Vacuum - STP-iX455 turbomolecular pump Part information
Product description Part No.
STP-iX455 Pump
ISO100K PT640Z010
ISO160K PT640Z020
DN100CF PT640Z050
DN160CF PT640Z060
iPS-240 Power Supply PT64W0Z00
STP-iX455-iPS-240 interconnection cable
5 m PT64Y0B20
10 m PT64Y0B30
15 m PT64Y0B40
20 m PT64Y0B50
Power supply cable for iPS-240
3 m PT64Y0A10
5 m PT64Y0A20
iDT-001 Display Unit PT64W1Z00
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