Edwards® Vacuum - Turbo pumps and accessories
EXT turbomolecular pumps
EXT75DX compound turbomolecular pump
EXT255DX compound turbomolecular pump
EXT255H compound turbomolecular pump
EXT406PX compound turbomolecular pump
EXT556H compound turbomolecular pump
Turbomolecular pump controllers
Edwards Vacuum: EXC controllers
Edwards Vacuum: TIC turbo controller
Edwards: TIC turbo & instrument controller
EXT accessories
Edwards EXT accessories
EXT pump to controller cable
EXT ACX air-cooler
EXT BX bakeout band
EXT PRX10 purge-restrictor
EXT TAV vent-valve
EXT Vent-port adaptor
EXT Vibration isolator
EXT VRX vent-restrictor
EXT turbo pump spares
EXPT combined outfits
Edwards EXPT 1 &2 pumping stations
STP magnetically levitated turbomolecular pumps and accessories
Edwards Vacuum - STP turbo pumps
STP-XA4503C turbomolecular pump
STP-iX455 turbomolecular pump
STP301/STP301C turbomolecular pump
STP-L301/STP-L301C turbomolecular pump
STP603/STP603C turbomolecular pump
STP1003/STP1003C turbomolecular pump
STPH301C high performance turbo pump
STPH451C high performance turbo pump
STPA803C "advantage" turbo pump
STPA1303C "advantage" turbo pump
STPA1603C turbomolecular pump
STPA2203C "advantage" turbo pump
STP-XA2703C turbo pump
STP-XA3203C turbo pump
Edwards® turbo molecular pumps (turbo vacuum pumps) overview, information and definitions
A turbomolecular pump (TMP)
A compound molecular pump (CMP)
Turbo vacuum pumps - pumping speed
Turbo vacuum pumps - quiescent electrical power
Turbo vacuum pumps - compression ratio
Turbo vacuum pumps - ultimate pressure
Turbo vacuum pumps - bearing and suspension
Turbo vacuum pumps - rotor
Turbo vacuum pumps - motor
Turbo vacuum pumps - corrosive applications
Turbo vacuum pumps - purge port
Turbo vacuum pumps - venting
Turbo vacuum pumps - inlet screen
Turbo vacuum pumps - cooling
Turbo vacuum pumps - scope of supply | Edwards® Vacuum STP1003/STP1003C turbomolecular pump- Edwards® STP1003
- Corrosion resistant
- STP1003C: new turbomolecular pumps for use in the most advanced of semiconductor applications
- Edwards® rotor technology gives class-leading performance for maximum process flexibility
- Approved by major equipment manufacturers in the semiconductor and magnetic media industries
Edwards® Vacuum STP1003/STP1003C turbomolecular pump Technical Specification - Features
- Advanced rotor technology
- • Maximized process flexibility
- • Harsh process compatible (C version)
- Advanced controller design
- • Self diagnostic functions
- Compact design
Edwards® Vacuum STP1003/STP1003C turbomolecular pump Compression ratio
(compression ration CR vs backing pressure)
Edwards® Vacuum STP1003/STP1003C turbomolecular pump Pumping speed
(pumping speed vs inlet pressure)
Edwards® Vacuum STP1003/STP1003C turbomolecular pump Dimensions
A Electrical connector
B Outlet port
C Purge port (C version only)
Edwards® Vacuum STP1003/STP1003C turbomolecular pump Controller
Edwards® Vacuum STP1003/STP1003C turbomolecular pump L-type connector
A Polarizing groove
B Outlet port
C Polarizing boss
Edwards® Vacuum STP1003/STP1003C turbomolecular pump Technical data
Inlet flange: ISO200F / DN200CF
Outlet port: KF40
Purge port: KF10 (C version only)
Pumping speed
N2: 1000 L s-1
H2: 800 L s-1
Compression ratio
N2: >108
H2: >105
Ultimate pressure with bake out heating
ISO inlet flange 10-7 (10-9) order Pa (Torr)
CF inlet flange (not C version) 10-8 (10-10) order Pa (Torr)
CF inlet flange (C version only) 6.5 x 10-6 (5 x 10-8) Pa (Torr)
Maximum continuous outlet pressure* 13 (0.1) Pa (Torr)
Rated speed 35000 rpm
Starting time 6 min
Maximum inlet flange temperature 120 ºC
Input voltage 100 to 120 V a.c. (±10%) or
200 to 240 V a.c. (±10%)
Power consumption (continuous) 0.8 kVA
Weight
Pump 31 kg
Controller 9 kg
* Water cooled
** With cooling water, for bakeout
Edwards® Vacuum STP1003/STP1003C turbomolecular pump part information
Product description Part No.
STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below.
STP1003
ISO200F PT390Z001
DN200CF B72101040
STP1003C
ISO200F B72101030
DN200CF PT39AZ003
Controller
100 V-120 V/200-240 V 50/60 Hz RS232C PT56Z0Z00
Connection cables
Straight connector
3 m B75130050
5 m B75130020
10 m B75130060
Power cables
Ring terminal 5 m PT46Y0A01
Ring terminal 10 m PT46Y0A10
Options
Water cooling coil
Horizontal fitting RC1/4 B72132020
Vibration Isolator
ISO200 B58061000
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