Vacuum Measurement and control systems - Edwards (formely known as BOC Edwards) vacuum guages

Edwards (formerly BOC Edwards) AIGX Active ION Gauge

5x10^-2 Torr to 5x10^-10 Torr

A compact active ion gauge with dual yttria coated iridium filaments, a wide measuring range from 6.6 x 10^-2 mbar to 6.6 x 10^-10 mbar. Torr ( 5 x 10^-2 to 5 x 10^-10) and a 1 Colt/decade linear output.

The new Edwards (formerly known as BOC Edwards) AIGX gauge incorporates all the benefits of the industry standard active gauge concept, with integral eletronics and replaceable tube. The gauge has degas facility and includes features to protect and extend the life of the filaments.

The AIGX benefits from extremely low emissions of charged particles, which makes it an excellent choice for processes where background noise is undesirable.

Features and Benefits

• Full 8-decade measurement capability to 6.6 x 10^-10 mbar (5 x 10^-10 Torr)

• Two versions available, each with three vacuum coupling varients:

  'D' versions have a 9-pin 'D' connector and standard interface

  'S' versions have enhanced functionality and are fully compatible with the range of Edwards (formerly known as BOC Edwards) controllers

• Up to a third-fold reduction in charged particle process contamination compared to leading competitors

• Automatic filament protection against switching on at atmosphere and running or degassing at high pressure

• Gauge sensitivity remains constant over the whole measuring range, thus maintaining output accuracy at higher pressures

• Continuous pressure measurement output during degas

• Innovative design eliminates the affects of X-ray limits

• B-colour LED gives local indication of gauge status

• Wide input voltage range

• Electronics very easily removable for bakeout at up to 200ºC

• 'S' versions provided with seamless automatic emission current switching, for prolonged filament life

• 'S' version provided with diagnostic outputs indicating 'emission off', 'broken filament' and 'overpressure trip' to help with troubleshooting

• 'S' versions provided with a push button adjustable set point

Technical specification

Pressure range: 6.6x 10^-2 to 6.6x10^-10 mbar

(5x10^-2 to 5x10^-10 Torr)

Power Supply: +14.5 to +36 V d.c. (max 1 V ripple)

Power consumption: Normal operation: 7W (MAX)

Degas: 15W (MAX)
Output signal:

Linear, 1 Volt/decade

Response time: 1.33 x 10^-8 mbar (>10^-8 Torr) ≈100ms

1.33 x 10^-8 mbar (>10^-8 Torr) ≈1.2s

Tube details:

Accuracy*: typically +/- 15% of reading

(better with optional calibration)

Repeatability +/- 5%

Filaments: Manually selectable dual yttria coated iridium

Degas: Three minute electron bombardment cycle

Emission current: 0.1mA & 1mA

'S' versions Automatically switches at 1.33 x 10^-5 mbar (10^-5 Torr) to protect filaments at higher pressures

'D' versions Manual control

Maximum overpressure: 10 bar absolute (145 psi)

Materials exposed to vacuum

Aluminium tube: Tungsten, Tantalum Pt clad Mo, Yttria coated iridium, St St 304L and UHV compatible glass/ceramic

Vacuum Fitting: NW25, DN16CF & DN40 CF (CF couplings removed)

Diagnostics error/status – gauge output):

Note: all errors require a manual off/on re-start

'S' versions 'D' versions

Emission off 9.0V 10.0V

(supply on, emission off)

Emission error 9.5V 10.0V

(E.G. Selected filament broken)

Overpressure trip 9.5V 10.0V

(protection against turn-on at atmosphere)

Diagnostics (error/status – LED)

Supply connected, emission off Amber

Emission initiation: Green/Amber alternating flash

Normal operation: Green

Degas: Green flash

Overpressure error: Red

Emission error: Red flash

Protection

High pressure shutdown:

In all cases the gauge will shut down at 6.6 x 10^-2 mbar (>5 x 10^-2 Torr), requiring an off/one cycle to restart

Degas:

In degas, if the pressure rises above 1.33 x 10-4 mbar (1 x 10-4 Torr), degas will be turned off, but the degas timer will continue to run. Degas will automatically resume when the pressure falls below 4 x 10^-5 mbar (3 x 10 ^-5 Torr) if the degas timer has not timed out.

Adjustments: No user calibration adjustments required

Set point: Open collector transistor

1 on 'S' versions only

Maximum voltage: 30 V d.c.

Maximum current: 100 mA max

Temperature range:

Operating temperature: 0 to +40 ºC

Storage temperature: -30 to +70 ºC

Filament:

APGX-L and APGX-M Gold coated tungsten

APGX-MP Platinum/Rhodium (90/10)

Internal volume: NW: 6 cm³

Weight:

Aluminium: 0.12kg

Stainless Steel: 0.2kg

External interface connector:

'S' versions: 8 way FCC68(RJ45) socket

'D' versions: 9-way 'D' type plug (pins)

Interface cables

'S' versions

Using a Edwards (formerly known as BOC Edwards) instrument controller or 24 V supply, a maximum cable run of 30m may be achieved using the cables specified. (Lower supply voltages will reduce cable lengths)

'D' versions

Maximum cable lengths for given conductor cross sections and supply voltages are shown in the table below:

Standards

Electronic design: BS EN 61010-1

Eletromagnetic compatibility: EN 61326 Industrial Location, Class B emissions

Flame resistant casing: UL 94 (V0)

Enclosure rating: IP 30

Compatibility: The AIGX is supported by all new AGC's with serial numbers greater than 006737476 (non-RS 232 versions) and 006741851 (RS 232 versions). Earlier controllers will require a software upgrade.

Pin allocation

Ordering information