Absolute Vacuum present:
Edwards® (formerly BOC Edwards®) Model
655, 658 and 659 Barocel ®
Vacuum Pressure Transducer
The
Edwards® 655 series of Barocel transducers employ a number of proprietary
design features to enhance reliability and performance.
- The sensing
cell utilises a unique diaphragm design, stitch welding process
- New sensing cavity geometry for enhanced resistance to
particulate contamination
- The Isolating the sensor is in a temperature controlled,
hermetically sealed enclosure (neutralising affects of
changes in barometric pressure, humidity and ambient temperature).
- Transducer with long term stability.
Edwards® Model
655, 658 and 659 Barocel ®
Vacuum Pressure Transducer
Technical Features
- Wide
measuring range – Full four decade measurement
- High
accuracy – 0.15% of reading
- High
resolution – better than 0.0005% full scale
- Temperature
controlled – Internal temp maintained at 45, 100 or 123°C
depending on the model selected – improved zero stability: Better
than 0.002% FS / °C
- True
total pressure – calibration and measurement independent of gas
composition
- High
level d.c. Output
Edwards® Model
655, 658 and 659 Barocel ®
Vacuum Pressure Transducer
Applications
- Plasma
deposition/etch
- Sputtering/PVD/RTP
- Industrial
CVD/Ion implantation
- LPCVC
- Crystal
growing/Freeze dryers
Edwards® Model
655, 658 and 659 Barocel ®
Vacuum Pressure Transducer
Technical
specification
Pressure
ranges:
0-50,
0-100m Torr
0.1,
0-2, 0-5, 0-10, 0-100 Torr and mbar
0-1000
Torr
other
ranges also available
Accuracy:
± ( 0.15% of reading + 0.005% of full scale)
Repeatability:
±0.01% of full scale
Resolution:
±0.005% full scale
Warm
up time: 2 hours
Heater
temperature
Ambient
operating temperature
655 15-40°C
658 15-70°C
959 15-70°C
Storage
temperature: -45°C to +85°C
Temperature
effect on zero
>1
Torr: <0.002% of full scale / °C
≤1
Torr: <0.005% of full scale / °C
Temperature
affect on sensitivity < 0.02% reading/ °C
Barometric
pressure effects <0.005% of full scale / 760 Torr
Ambient
relative humidity effects: <0.005% of full scale in range |
0-95% RH
Overpressure
limit: 13.1 bar abs (45 psia)
Leak
rate to ambient: <1 x 10-10 std cc / sec at 760 Torr
applied pressure
Material
exposed to process: Inconel and Monel, 316 ss
Internal
Volume: 8.33cc (includes 1/2” OD tube)
Power
requirements:
655
250 mA max
658 500
mA max
659 700
mA max
Output
signal: 0-10 V d.c. Linear with pressure
Output
Impedance < 0.1 ohms
Output
noise (0-2 Khz) < 0.002% of full scale rms
Weight:
0.55 KG (1.2lb)
Standards
Electronic
design: EN 61010-1
Electromagnetic
compatibility: EN 61326 Industrial Location, Class A Emissions
Fitting DIM”X”
Mini
ConFlat® 35mm/1.37 in
Cajon
8VCR 62mm/2.44 in
Cajon
8VCO 44mm/1.73 in
NW16 36mm/1.41
in
Tri-clover 34mm/1.33
in
Edwards® Model
655, 658 and 659 Barocel ®
Vacuum Pressure Transducer
Accessories
Adapter
cable Burocel 655 to AGC (female FCC68) 0.5m: D40003050
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