Compatible with TIC Turbo and Instrument Controller
Multiple communication modes available
Parallel mode allows traditional control signal interface
Serial mode allows RS-232 interface
Numerous user configurable parameters via RS-232 interface
Vent valve control settings
Normal speed indication
Stand-by running speed
Programmable power settings
Power consumption
Pump temperature
Enhanced monitoring capability including pump speed, power and temperature
EXT75DX compound turbomolecular pump - Technical data
Inlet flange: DN63ISO-K, DN63CF or DN40NW Compression ratio N2: >1 × 1011 He: 1 x 106 H2: 5 x 104 Outlet flange: DN16NW Interstage port (Hi variants): DN25NW Recommended backing pump*: 1 E2M0.7 Vent port: 1/8 inch BSP Purge port: 1/8 inch BSP Maximum continuous inlet pressure (light gas pumping) water cooling (water at 15 °C ambient temp at 40 °C): 2 × 10-2 mbar forced air cooled, 35 °C ambient: 1 × 10-2 mbar Nominal rotational speed: 90000 rpm Standby rotational speed: Variable from 49500 to 90000 rpm (63000 rpm default) Start time 90% speed: 110 s Cooling method: Forced air / water Ambient air temperature for forced air cooling: 5-35 °C Minimum cooling water flow rate (water 15 °C): 15 L h-1 Water temperature range: 10-20 °C Maximum inlet flange temperature: 100 °C Operating attitude: Vertical and upright, through to horizontal Noise level at 1 metre: <50 dB(A) Maximum magnetic field: 5 mT Recommended controller: TIC100 turbo or turbo and instrument controlled Quiescent electrical power: 10 W Interstage pumping speed (Hi variants): 4 l s-1
Inlet flange Pumping speed (l s-1) N2 He H2 Ultimate pressure (mbar) With rotary vane backing pump With diaphragm backing pump Weight (kg)
A Manual vent valve in vent port B Podule C Logic interface connector D Backing Port E Purge Port (blanked off) F Interstage port (EXT75iDX only) G Podule connector socket H Earth Connection
EXT75DX compound turbomolecular pump - Ordering information
