Turbo vacuum pumps: Edwards (formely known as BOC Edwards) turbomolecular vacuum pumps

Edwards vacuum (formerly BOC Edwards) Turbomolecular pumps: Edwards EXT406PX compound turbomolecular pump

Edwards (formerly BOC Edwards) Vacuum - Turbo pumps and accessories

EXT turbomolecular pumps

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Turbomolecular pump controllers

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EXT accessories

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EXPT combined outfits

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STP magnetically levitated turbomolecular pumps and accessories

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Edwards turbo molecular pumps (turbo vacuum pumps) overview, information and definitions

The EXT406PX compound turbomolecular pump with fluid dynamic technology combines turbomolecular and drag stages with an innovative fluid dynamic stage. This delivers high throughput high backing pressure operation which provides a cost effective vacuum solution by reducing the backing pump capacity requirement. In addition, the optional "Boost" stage, when correctly employed, can reduce primary pump count offering pumping speeds of up to 34 m3h-1

Edwards EXT406PX compound turbomolecular pump

Edwards EXT406PX compound turbomolecular pump - Features & benefits

• Pumping Speed
• 400 ls-1 (N2) ISO160 & CF160
• 300 ls-1 (N2) ISO100 & CF100
• Vacuum System Simplification
• Capable of operating with a considerably smaller backing pump
• Reduces the footprint and power consumption of the vacuum system
• Can operate at 8 mbar backing pressure with main inlet loaded to 2 E-3
• Can sustain normal operation at backing pressures of up to 17 mbar
• Optional boost port offers up to 24 m3h-1pumping speed at up to 4 mbar pressure
• Ideally suited for use with diaphragm pumps, particularly when using hydrogen
• 24 V DC controller compatible with Edwards TIC Turbo or TIC Turbo & Instrument Controller
• Can also be used with customers own 24 V DC power supply

Edwards EXT406PX compound turbomolecular pump - Technical data

Inlet flanges: DN100ISO-K, DN100CF, DN160ISO- K, & DN160CF
Compression ratio

Backing port outlet flange: DN25NW
Boost port inlet flange: DN25NW
Recommended backing pump: XDS10 or RV12 (or smaller depending upon application)

Maximum continuous inlet pressure (air)

Nominal rotational speed: 60000 rpm
Start time 90% speed: 285 s
Cooling method: Forced air / water
Ambient air temperature for forced air cooling: 5 - 35 °C
Minimum cooling water flow rate (water 15 °C): 15 L h-1
Water temperature range: 10 - 20 °C
Maximum inlet flange temperature: 100 °C
Operating attitude: Vertical and upright, through to horizontal
Noise level at 1 metre: <45 dB(A) typical
Maximum magnetic field: 5 mT
Recommended controller:  EXDC160 (24V)Can be used in combination with TIC200 Turbo or Turbo & Instrument controller
Quiescent electrical power: 25 - 40 W
Boost Port (Optional) pumping speed

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Edwards EXT406PX compound turbomolecular pump - Pumping speed

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Edwards EXT406PX compound turbomolecular pump – Dimensions

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Edwards EXT406PX compound turbomolecular pump – ordering information

Product description                                                                                         Order No.
Pump                                                     Inlet flange
EXT406PX ISO100 Boost                     DN100ISO                                         B76011991
EXT406PX CF100 Boost                      DN100CF                                          B76012991
EXT406PX ISO160 Boost                     DN160ISO                                         B76021991
EXT406PX CF160 Boost                      DN160CF                                          B76022991
EXT406PX ISO100                                DN100ISO                                         B76031991
EXT406PX CF100                                 DN100CF                                          B76032991
EXT406PX ISO160                                DN160ISO                                         B76041991
EXT406PX CF160                                 DN160CF                                          B76042991
Accessories Order No.
EXDC Controller*                                   D39646000
Axial fan                                                                                                                B58053405
TIC Turbo Controller                               D39712000
Water cooling block                                                                                             B73501164
Radial fan                                                D39653455
TIC Turbo & Instrument Controller        D39722000
* For applications where more than 50% of pumped gas mixture is Argon, EXDC80 (part number D39645000) is recommended. For further information, please contact your Edwards representative.