Edwardsź Vacuum - Turbo pumps and accessories
EXT turbomolecular pumps
EXT75DX compound turbomolecular pump
EXT255DX compound turbomolecular pump
EXT255H compound turbomolecular pump
EXT406PX compound turbomolecular pump
EXT556H compound turbomolecular pump
Turbomolecular pump controllers
Edwards Vacuum: EXC controllers
Edwards Vacuum: TIC turbo controller
Edwards: TIC turbo & instrument controller
EXT accessories
Edwards EXT accessories
EXT pump to controller cable
EXT ACX air-cooler
EXT BX bakeout band
EXT PRX10 purge-restrictor
EXT TAV vent-valve
EXT Vent-port adaptor
EXT Vibration isolator
EXT VRX vent-restrictor
EXT turbo pump spares
EXPT combined outfits
Edwards EXPT 1 &2 pumping stations
STP magnetically levitated turbomolecular pumps and accessories
Edwards Vacuum - STP turbo pumps
STP-XA4503C turbomolecular pump
STP-iX455 turbomolecular pump
STP301/STP301C turbomolecular pump
STP603/STP603C turbomolecular pump
STP1003/STP1003C turbomolecular pump
STPH301C high performance turbo pump
STPH451C high performance turbo pump
STPA803C "advantage" turbo pump
STPA1303C "advantage" turbo pump
STPA1603C turbomolecular pump
STPA2203C "advantage" turbo pump
STP-XA2703C turbo pump
STP-XA3203C turbo pump
Edwardsź turbo molecular pumps (turbo vacuum pumps) overview, information and definitions
A turbomolecular pump (TMP)
A compound molecular pump (CMP)
Turbo vacuum pumps - pumping speed
Turbo vacuum pumps - quiescent electrical power
Turbo vacuum pumps - compression ratio
Turbo vacuum pumps - ultimate pressure
Turbo vacuum pumps - bearing and suspension
Turbo vacuum pumps - rotor
Turbo vacuum pumps - motor
Turbo vacuum pumps - corrosive applications
Turbo vacuum pumps - purge port
Turbo vacuum pumps - venting
Turbo vacuum pumps - inlet screen
Turbo vacuum pumps - cooling
Turbo vacuum pumps - scope of supply | Edwardsź Vacuum turbo pumps - STPH451C high performance turbomolecular pump- Edwardsź STPH451C: turbomolecular pump
- Suited to
semiconductor installations
- Edwardsź advanced rotor technology
for maximum process flexibility
- STPH451C approved for use in the
semiconductor and magnetic media fields
Edwardsź Vacuum turbo pumps - STPH451C high performance turbomolecular pump
Technical Specification - Features
- Advanced rotor technology
- Maximized process flexibility
- Oil free
- Low vibration
- High reliability
- Maintenance free
- Harsh process compatible
- Increased life
- Advanced controller design
- Auto tuning
- Self diagnostic functions
- d.c. motor drive
- Battery-free operation
- Compact design
- Small footprint
- Half rack controller
- 5 axis magnetic suspension system
- Zero contamination
- Low maintenance
- Any orientation operation
Edwardsź Vacuum turbo pumps - STPH451C high performance turbomolecular pump
L type connector
A Polarizing groove
B Outlet port
C Polarizing boss
Edwardsź Vacuum turbo pumps - STPH451C high performance turbomolecular pump Speed and power curves
Edwardsź Vacuum turbo pumps - STPH451C high performance turbomolecular pump
Dimensions
A Electrical connector
B Outlet port
C Purge port
D Cooling water out
E Cooling water in
Edwardsź Vacuum turbo pumps - STPH451C high performance turbomolecular pump
Controller
Edwardsź Vacuum turbo pumps - STPH451C high performance turbomolecular pump
Technical data
Inlet flange
ISO160K / DN160CF
Outlet port
KF40
Purge port
KF10
Water cooling fitting
PT1/4
Pumping speed
N2 450 l s-1
H2 300 l s-1
Compression ratio
N2 >108
H2 103
Ultimate pressure with bake out heating
10-7 (10-9) order Pa (Torr)
Maximum continuous outlet pressure*
660 (5) Pa (Torr)
Maximum Nitrogen throughput*
2500 sccm
Rated speed
48000 rpm
Starting time
4 min
Maximum inlet flange temperature
120 șC
Input voltage
100 to 120 V a.c. (±10%) or
200 to 240 V a.c. (±10%)
Power consumption
0.6 kVA
Weight
Pump 15 kg
Controller 9 kg
* Water cooled
Edwardsź Vacuum turbo pumps - STPH451C high performance turbomolecular pump Part informationProduct description Part No.
STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below.
STPH451C
ISO160K inlet B71901001
DN160CF inlet PT340Z005
Controller
100-120 V/200-240 V 50/60 Hz RS232C PT56Z0Z00
Connection cables
Straight connector
3 m B75130050
5 m B75130020
10 m B75130060
Power cables
Ring terminal 5 m PT46Y0A01
Ring terminal 10 m PT46Y0A10
TMS system is available for this model. For a complete installation order an STP pump (TMS), a controller, a TMS connection cable kit, a connection cable, and power cable is required.
STPH451CV (TMS)
ISO160F PT3416007
DN160CF PT3416006
TMS connection cable kit
5 m PT330V000
10 m PT330V001
15 m PT330V002
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