EdwardsŽ Vacuum - Turbo pumps and accessories
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EXT75DX compound turbomolecular pump
EXT255DX compound turbomolecular pump
EXT255H compound turbomolecular pump
EXT406PX compound turbomolecular pump
EXT556H compound turbomolecular pump
Turbomolecular pump controllers
Edwards Vacuum: EXC controllers
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Edwards EXPT 1 &2 pumping stations
STP magnetically levitated turbomolecular pumps and accessories
Edwards Vacuum - STP turbo pumps
STP-XA4503C turbomolecular pump
STP-iX455 turbomolecular pump
STP301/STP301C turbomolecular pump
STP-L301/STP-L301C turbomolecular pump
STP603/STP603C turbomolecular pump
STP1003/STP1003C turbomolecular pump
STPH301C high performance turbo pump
STPH451C high performance turbo pump
STPA803C "advantage" turbo pump
STPA1303C "advantage" turbo pump
STPA1603C turbomolecular pump
STPA2203C "advantage" turbo pump
STP-XA2703C turbo pump
STP-XA3203C turbo pump
EdwardsŽ turbo molecular pumps (turbo vacuum pumps) overview, information and definitions
A turbomolecular pump (TMP)
A compound molecular pump (CMP)
Turbo vacuum pumps - pumping speed
Turbo vacuum pumps - quiescent electrical power
Turbo vacuum pumps - compression ratio
Turbo vacuum pumps - ultimate pressure
Turbo vacuum pumps - bearing and suspension
Turbo vacuum pumps - rotor
Turbo vacuum pumps - motor
Turbo vacuum pumps - corrosive applications
Turbo vacuum pumps - purge port
Turbo vacuum pumps - venting
Turbo vacuum pumps - inlet screen
Turbo vacuum pumps - cooling
Turbo vacuum pumps - scope of supply | EdwardsŽ Vacuum STPH301C high performance turbomolecular pump- Edwards STPH301C: turbomolecular pump
- Suited to
harsh and extreme semiconductor installations
- Edwards advanced rotor technology
for maximum process flexibility
- STPH301C approved for use in the
semiconductor and magnetic media fields
STPH301C high performance turbomolecular pump
Technical Specifications - Features
- Advanced rotor technology
- Maximized process flexibility
- Harsh process compatible
- Advanced controller design
- Self diagnostic functions
- Compact design
- 5 axis magnetic suspension system
- Any orientation operation
STPH301C high performance turbomolecular pump L type connector
A Polarizing groove
B Outlet port
C Polarizing boss
STPH301C high performance turbomolecular pump Speed and power curves
STPH301C high performance turbomolecular pump Dimensions
A Electrical connector
B Outlet port
C Purge port
D Cooling water out
E Cooling water in
STPH301C high performance turbomolecular pump
Technical data
Inlet flange:
ISO100K / DN100CF
Outlet port:
KF40
Purge port:
KF10
Water cooling fitting:
PT1/4
Pumping speed
N2: 300 l s-1
H2: 200 l s-1
Compression ratio
N2: >108
H2:103
Ultimate pressure with bake out heating
10-7 (10-9) order Pa (Torr)
Maximum continuous outlet pressure*
660 (5) Pa (Torr)
Maximum Nitrogen throughput*
2500 sccm
Rated speed
48000 rpm
Starting time
4 min
Maximum inlet flange temperature
120 ēC
Input voltage
100 to 120 V a.c. (ą10%) or
200 to 240 V a.c. (ą10%)
Power consumption
0.6 kVA
Weight
Pump
15 kg
Controller
9 kg
* Water cooled
STPH301C high performance turbomolecular pump
Part information
Product description Part No.
STP pump is supplied with an inlet screen.
For a complete installation order an STP pump, a controller, a
connection cable and power cable from the information below.
STPH301C
ISO100K inlet B71901010
DN100CF inlet PT340Z004
Controller
100-120 V/200-240 V 50/60 Hz RS232C PT56Z0Z00
Connection cables
Straight connector
3 m B75130050
5 m B75130020
10 m B75130060
Power cables
Ring terminal 5 m PT46Y0A01
Ring terminal 10 m PT46Y0A10
TMS system is available for this model. For a complete installation
order an STP pump (TMS), a controller, a TMS connection cable
kit, a connection cable, and power cable is required.
STPH301CV (TMS)
ISO100F PT3416001
DN100CF PT3416005
TMS connection cable kit
5 m PT330V000
10 m PT330V001
15 m PT330V002
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