Edwards® Vacuum - Turbo pumps and accessories
EXT turbomolecular pumps
EXT75DX compound turbomolecular pump
EXT255DX compound turbomolecular pump
EXT255H compound turbomolecular pump
EXT406PX compound turbomolecular pump
EXT556H compound turbomolecular pump
Turbomolecular pump controllers
Edwards Vacuum: EXC controllers
Edwards Vacuum: TIC turbo controller
Edwards: TIC turbo & instrument controller
EXT accessories
Edwards EXT accessories
EXT pump to controller cable
EXT ACX air-cooler
EXT BX bakeout band
EXT PRX10 purge-restrictor
EXT TAV vent-valve
EXT Vent-port adaptor
EXT Vibration isolator
EXT VRX vent-restrictor
EXT turbo pump spares
EXPT combined outfits
Edwards EXPT 1 &2 pumping stations
STP magnetically levitated turbomolecular pumps and accessories
Edwards Vacuum - STP turbo pumps
STP-XA4503C turbomolecular pump
STP-iX455 turbomolecular pump
STP301/STP301C turbomolecular pump
STP-L301/STP-L301C turbomolecular pump
STP603/STP603C turbomolecular pump
STP1003/STP1003C turbomolecular pump
STPH301C high performance turbo pump
STPH451C high performance turbo pump
STPA803C "advantage" turbo pump
STPA1303C "advantage" turbo pump
STPA1603C turbomolecular pump
STPA2203C "advantage" turbo pump
STP-XA2703C turbo pump
STP-XA3203C turbo pump
Edwards® turbo molecular pumps (turbo vacuum pumps) overview, information and definitions
A turbomolecular pump (TMP)
A compound molecular pump (CMP)
Turbo vacuum pumps - pumping speed
Turbo vacuum pumps - quiescent electrical power
Turbo vacuum pumps - compression ratio
Turbo vacuum pumps - ultimate pressure
Turbo vacuum pumps - bearing and suspension
Turbo vacuum pumps - rotor
Turbo vacuum pumps - motor
Turbo vacuum pumps - corrosive applications
Turbo vacuum pumps - purge port
Turbo vacuum pumps - venting
Turbo vacuum pumps - inlet screen
Turbo vacuum pumps - cooling
Turbo vacuum pumps - scope of supply | Edwards® vacuum, turbo pump - STPA803C "advantage" turbomolecular pump- Edwards® STPA803C: turbomolecular pump
- Suited to semiconductor installations
- Edwards® advanced rotor technology for maximum process flexibility
- STPA803C approved for use in the semiconductor and magnetic media fields
![Edwards vacuum, turbo pump - STPA803C \"advantage\" turbomolecular pump](/images/edwards-turbo-vacuum/STPA803C.jpg "Edwards vacuum, turbo pump - STPA803C \\"advantage\\" turbomolecular pump")
Edwards® vacuum, turbo pump - STPA803C "advantage" turbomolecular pump
Technical Specifications - Features
- Advanced rotor technology
- • Maximized process flexibility
- • Harsh process compatible
- Advanced controller design
- • Self diagnostic functions
- Compact design
Edwards® vacuum, turbo pump - STPA803C "advantage" turbomolecular pump
L type connector
A Polarizing groove
B Outlet port
C Polarizing boss
Edwards® vacuum, turbo pump - STPA803C "advantage" turbomolecular pump
Speed and power curves
Edwards® vacuum, turbo pump - STPA803C "advantage" turbomolecular pump
Dimensions
A Electrical connector
B Outlet port
C Purge port
Edwards® vacuum, turbo pump - STPA803C "advantage" turbomolecular pump
Controller
![Edwards vacuum, turbo pump - STPA803C \"advantage\" turbomolecular pump](/images/edwards-turbo-vacuum/STPA803C-controller.jpg "Edwards vacuum, turbo pump - STPA803C \\"advantage\\" turbomolecular pump")
Edwards® vacuum, turbo pump - STPA803C "advantage" turbomolecular pump
Technical data
Inlet flange
ISO160F / DN160CF
Outlet port
KF40
Purge port
KF10
Water cooling fitting
PT1/4
Pumping speed
N2 800 l s-1
H2 520 l s-1
Compression ratio
N2 >108
H2 103
Ultimate pressure with bake out heating
10-7 (10-9) order Pa (Torr)
Maximum continuous outlet pressure*
270 (2) Pa (Torr)
Maximum Nitrogen throughput*
1500 sccm
Rated speed
32500 rpm
Starting time
7 min
Maximum inlet flange temperature
120 ºC
Input voltage
200 – 240 V (±10%)
Power consumption (continuous)
0.85 kVA
Weight
Pump 39 kg
Controller 9 kg
* Water cooled
Edwards® vacuum, turbo pump - STPA803C "advantage" turbomolecular pump
Part information
Product description Part No.
STP pump is supplied with an inlet screen.
For a complete installation order an STP pump, a controller, a
connection cable and power cable from the information below.
STPA803C
ISO160F inlet B71801000
DN160CF inlet B71805010
Controller
200-240 V 50 Hz/60 Hz with RS232C PT56Z0Z00
Connection cables
Straight connector
3 m B75130050
5 m B75130020
10 m B75130060
Power cables
Ring terminal 5 m PT46Y0A01
Ring terminal 10 m PT46Y0A10
TMS system is available for this model. For a complete installation
order an STP pump (TMS), a controller, a TMS connection cable
kit, a connection cable, and power cable is required.
STPA803CV (TMS)
ISO160F PT3626000
DN160CF PT3626003
TMS connection cable kit
5 m PT330V000
10 m PT330V001
15 m PT330V002
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