Edwards® Vacuum - Turbo pumps and accessories
EXT turbomolecular pumps
EXT75DX compound turbomolecular pump
EXT255DX compound turbomolecular pump
EXT255H compound turbomolecular pump
EXT406PX compound turbomolecular pump
EXT556H compound turbomolecular pump
Turbomolecular pump controllers
Edwards Vacuum: EXC controllers
Edwards Vacuum: TIC turbo controller
Edwards: TIC turbo & instrument controller
EXT accessories
Edwards EXT accessories
EXT pump to controller cable
EXT ACX air-cooler
EXT BX bakeout band
EXT PRX10 purge-restrictor
EXT TAV vent-valve
EXT Vent-port adaptor
EXT Vibration isolator
EXT VRX vent-restrictor
EXT turbo pump spares
EXPT combined outfits
Edwards EXPT 1 &2 pumping stations
STP magnetically levitated turbomolecular pumps and accessories
Edwards Vacuum - STP turbo pumps
STP-XA4503C turbomolecular pump
STP-iX455 turbomolecular pump
STP301/STP301C turbomolecular pump
STP-L301/STP-L301C turbomolecular pump
STP603/STP603C turbomolecular pump
STP1003/STP1003C turbomolecular pump
STPH301C high performance turbo pump
STPH451C high performance turbo pump
STPA803C "advantage" turbo pump
STPA1303C "advantage" turbo pump
STPA1603C turbomolecular pump
STPA2203C "advantage" turbo pump
STP-XA2703C turbo pump
STP-XA3203C turbo pump
Edwards® turbo molecular pumps (turbo vacuum pumps) overview, information and definitions
A turbomolecular pump (TMP)
A compound molecular pump (CMP)
Turbo vacuum pumps - pumping speed
Turbo vacuum pumps - quiescent electrical power
Turbo vacuum pumps - compression ratio
Turbo vacuum pumps - ultimate pressure
Turbo vacuum pumps - bearing and suspension
Turbo vacuum pumps - rotor
Turbo vacuum pumps - motor
Turbo vacuum pumps - corrosive applications
Turbo vacuum pumps - purge port
Turbo vacuum pumps - venting
Turbo vacuum pumps - inlet screen
Turbo vacuum pumps - cooling
Turbo vacuum pumps - scope of supply | Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump- Edwards STPA2203C turbomolecular pump
- Well suited to emiconductor projects.
- Advanced rotor technology giving maximum process flexibility.
- Half rack controller
- D.C. drive technology for batteryfree operation.
- STPA2203C approved for use by major etch, ion implant and deposition equipment manufacturers in the semiconductor and magnetic media industries.
Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump
Technical Specification - Features
- Advanced rotor technology
- • Higher gas throughput
- • Maximized process flexibility
- 5 axis magnetic suspension system
- • Zero contamination
- • Low maintenance
- Corrosion resistant
- • Harsh process compatible
- • Increased life
- Compact construction
- • Small footprint
- • Half rack controller
- Advanced controller design
- • Tuning free
- • Self diagnostic functions
- • d.c. motor drive
- • Battery-free operation
Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump
Pumping speed
(pumping speed vs inlet pressure)
Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump
Compression ratio
(compression ration CR vs backing pressure)
![Edwards Vacuum turbo pumps STPA2203C \"advantage\" turbomolecular pump](/images/edwards-turbo-vacuum/STPA2203C-compression.jpg "Edwards Vacuum turbo pumps STPA2203C \\"advantage\\" turbomolecular pump")
Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump
Dimensions
A Electrical connector
B Outlet port
C Purge port
D Cooling water out
E Cooling water in
F Temperature sensor connector
Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump
Controller
![Edwards Vacuum turbo pumps STPA2203C \"advantage\" turbomolecular pump](/images/edwards-turbo-vacuum/STPA2203C-CONTROLLER.jpg "Edwards Vacuum turbo pumps STPA2203C \\"advantage\\" turbomolecular pump")
Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump
L type connector
A Polarizing groove
B Outlet port
C Polarizing boss
Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump
Technical data
Inlet flange
ISO250F / ICF305
Outlet port
KF40
Purge port
KF10
Water cooling fitting
PT1/4
Pumping speed
N2 2200 l s-1
H2 1700 l s-1
Compression ratio
N2 >108
H2 2.5 x 104
Ultimate pressure
10-6 (10-8) order Pa (Torr)
Maximum allowable backing pressure
400 (3) Pa (Torr)
Maximum nitrogen throughput
1500 sccm
Rated speed
27000 rpm
Starting time
7 min
Mounting position
Any
Water cooling
Flow 2 l min-1
Temperature
5-25 ºC
Pressure
2.9 x 105 Pa 3 kgf/cm
Recommended purge gas flow
20 (3.4 x 10-2) sccm
Input voltage
200 – 240 V a.c. (±10%)
Typical power consumption
1.5 kVA
Weight
Pump 61 kg
Controller 12 kg
Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump
Ordering information
Product description Part No.
STP pump is supplied with an inlet screen.
For a complete installation order an STP pump, a controller, a
connection cable and power cable from the information below.
STPA2203C
ISO250F PT4V0Z002
DN250CF PT4V0Z003
Controller
200-240 V 50/60 Hz RS232C PT59Z0Z00
Connection cables
Straight connector
3 m B75030030
5 m B75030010
10 m B75030040
Power cables
Ring terminal 5 m B75030020
Ring terminal 10 m PT35Y0A00
TMS system is available for this model. For a complete installation
order an STP pump (TMS), a controller, a TMS connection cable
kit, a connection cable, and power cable is required.
STPA2203CV (TMS)
ISO250F PT4V66001
DN250CF PT4V66002
TMS connection cable kit
5 m PT351V000
10 m PT351V001
15 m PT351V002
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