Edwards® Vacuum - Turbo pumps and accessories
EXT turbomolecular pumps
EXT75DX compound turbomolecular pump
EXT255DX compound turbomolecular pump
EXT255H compound turbomolecular pump
EXT406PX compound turbomolecular pump
EXT556H compound turbomolecular pump Turbomolecular pump controllers
Edwards Vacuum: EXC controllers
Edwards Vacuum: TIC turbo controller
Edwards: TIC turbo & instrument controller
EXT accessoriesEdwards EXT accessories EXT pump to controller cable EXT ACX air-cooler EXT BX bakeout band EXT PRX10 purge-restrictor EXT TAV vent-valve EXT Vent-port adaptor EXT Vibration isolator EXT VRX vent-restrictor EXT turbo pump spares
EXPT combined outfitsEdwards EXPT 1 &2 pumping stations
STP magnetically levitated turbomolecular pumps and accessoriesEdwards Vacuum - STP turbo pumps STP-XA4503C turbomolecular pump STP-iX455 turbomolecular pump STP301/STP301C turbomolecular pump STP-L301/STP-L301C turbomolecular pump STP603/STP603C turbomolecular pump STP1003/STP1003C turbomolecular pump STPH301C high performance turbo pump STPH451C high performance turbo pump STPA803C "advantage" turbo pump STPA1303C "advantage" turbo pump STPA1603C turbomolecular pump STPA2203C "advantage" turbo pump STP-XA2703C turbo pump STP-XA3203C turbo pump
Edwards® turbo molecular pumps (turbo vacuum pumps) overview, information and definitions
A turbomolecular pump (TMP) A compound molecular pump (CMP) Turbo vacuum pumps - pumping speed Turbo vacuum pumps - quiescent electrical power Turbo vacuum pumps - compression ratio Turbo vacuum pumps - ultimate pressure Turbo vacuum pumps - bearing and suspension Turbo vacuum pumps - rotor Turbo vacuum pumps - motor Turbo vacuum pumps - corrosive applications Turbo vacuum pumps - purge port Turbo vacuum pumps - venting Turbo vacuum pumps - inlet screen Turbo vacuum pumps - cooling Turbo vacuum pumps - scope of supply | Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump- Edwards STPA2203C turbomolecular pump
- Well suited to emiconductor projects.
- Advanced rotor technology giving maximum process flexibility.
- Half rack controller
- D.C. drive technology for batteryfree operation.
- STPA2203C approved for use by major etch, ion implant and deposition equipment manufacturers in the semiconductor and magnetic media industries.

Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump Technical Specification - Features
- Advanced rotor technology
- • Higher gas throughput
- • Maximized process flexibility
- 5 axis magnetic suspension system
- • Zero contamination
- • Low maintenance
- Corrosion resistant
- • Harsh process compatible
- • Increased life
- Compact construction
- • Small footprint
- • Half rack controller
- Advanced controller design
- • Tuning free
- • Self diagnostic functions
- • d.c. motor drive
- • Battery-free operation
Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump Pumping speed(pumping speed vs inlet pressure)

Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump Compression ratio(compression ration CR vs backing pressure)

Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump Dimensions

A Electrical connector B Outlet port C Purge port D Cooling water out E Cooling water in F Temperature sensor connector
Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump Controller

Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump L type connector

A Polarizing groove B Outlet port C Polarizing boss
Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump Technical data
Inlet flange ISO250F / ICF305 Outlet port KF40 Purge port KF10 Water cooling fitting PT1/4 Pumping speed N2 2200 l s-1 H2 1700 l s-1 Compression ratio N2 >108 H2 2.5 x 104 Ultimate pressure 10-6 (10-8) order Pa (Torr) Maximum allowable backing pressure 400 (3) Pa (Torr) Maximum nitrogen throughput 1500 sccm Rated speed 27000 rpm Starting time 7 min Mounting position Any Water cooling Flow 2 l min-1 Temperature 5-25 ºC Pressure 2.9 x 105 Pa 3 kgf/cm Recommended purge gas flow 20 (3.4 x 10-2) sccm Input voltage 200 – 240 V a.c. (±10%) Typical power consumption 1.5 kVA Weight Pump 61 kg Controller 12 kg
Edwards® Vacuum turbo pumps STPA2203C "advantage" turbomolecular pump Ordering information
Product description Part No. STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below.
STPA2203C ISO250F PT4V0Z002 DN250CF PT4V0Z003
Controller 200-240 V 50/60 Hz RS232C PT59Z0Z00
Connection cables
Straight connector 3 m B75030030 5 m B75030010 10 m B75030040
Power cables Ring terminal 5 m B75030020 Ring terminal 10 m PT35Y0A00
TMS system is available for this model. For a complete installation order an STP pump (TMS), a controller, a TMS connection cable kit, a connection cable, and power cable is required.
STPA2203CV (TMS) ISO250F PT4V66001 DN250CF PT4V66002
TMS connection cable kit 5 m PT351V000 10 m PT351V001 15 m PT351V002
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