EdwardsŽ
Vacuum -
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EXPT 1 &2 pumping stations
STP magnetically levitated turbomolecular
pumps and accessories
Edwards
Vacuum - STP turbo pumps
STP-XA4503C
turbomolecular pump
STP-iX455
turbomolecular pump
STP301/STP301C
turbomolecular pump
STP-L301/STP-L301C
turbomolecular pump
STP603/STP603C
turbomolecular pump
STP1003/STP1003C
turbomolecular pump
STPH301C
high performance turbo pump
STPH451C
high performance turbo pump
STPA803C
"advantage" turbo pump
STPA1303C
"advantage" turbo pump
STPA1603C
turbomolecular pump
STPA2203C
"advantage" turbo pump
STP-XA2703C
turbo pump
STP-XA3203C
turbo pump
EdwardsŽ turbo molecular
pumps (turbo vacuum pumps) overview, information and definitions
A turbomolecular pump
(TMP)
A compound molecular
pump (CMP)
Turbo vacuum
pumps - pumping speed
Turbo
vacuum pumps - quiescent electrical power
Turbo vacuum
pumps - compression ratio
Turbo vacuum
pumps - ultimate pressure
Turbo
vacuum pumps - bearing and suspension
Turbo vacuum pumps - rotor
Turbo vacuum pumps - motor
Turbo
vacuum pumps - corrosive applications
Turbo vacuum pumps -
purge port
Turbo vacuum pumps -
venting
Turbo
vacuum pumps - inlet screen
Turbo
vacuum pumps - cooling
Turbo vacuum
pumps - scope of supply | EdwardsŽ vacuum turbo pumps - STPA1603C turbomolecular pump
- Small and powerful Edwards STPA1603C
- Turbo-molecular pump designed using Edwards advanced rotor technology
- High throughput vacuum pump
- Maximum reliability
- Vacuum pump with class leading performance
- Well suited to semiconductor processes
- Half rack controller/compact design
- Advanced deposition reduction system for reliability and performance
- STPA1603C qualified on 200 mm etch tools/generation 300 mm oxide etch processes
EdwardsŽ vacuum turbo pumps - STPA1603C turbomolecular pump
Technical Specifications - Features
- Advanced Rotor Design
- Harsh process compatible
- 5 Axis Magnetic Suspension System
- Corrosion Resistant
- Harsh process compatible
- Compact Construction
- Advanced Controller Design
- Self diagnostic functions
EdwardsŽ vacuum turbo pumps - STPA1603C turbomolecular pump
L type connector
A Polarizing groove
B Outlet port
C Polarizing boss
EdwardsŽ vacuum turbo pumps - STPA1603C turbomolecular pump
Speed and power curves
EdwardsŽ vacuum turbo pumps - STPA1603C turbomolecular pump
Dimensions
 A Electrical connector
B Outlet port
C Purge port
D Cooling water out
E Cooling water in
EdwardsŽ vacuum turbo pumps - STPA1603C turbomolecular pump
Controller
EdwardsŽ vacuum turbo pumps - STPA1603C turbomolecular pump
Technical data
Inlet flange
ISO200F / DN200CF
Outlet port
KF40
Purge port
KF16
Water cooling fitting
PT1/4
Pumping speed
N2 1600 l s-1
H2 1200 l s-1
Compression ratio
N2 >108
H2 >7 x 103
Ultimate pressure with bake out heating
10-7 Pa
Maximum allowable backing pressure
266 (2.0) Pa (Torr)
Maximum nitrogen throughput
2500 sccm
Rated speed
36500 rpm
Starting time
7 min
Mounting position
Any
Water cooling
Flow
2 l min-1
Temperature
5-25 ēC
Pressure
3 kgf / cm-2
Recommended purge gas flow
20 sccm
Input voltage
200 240 V a.c. (ą10%)
Typical power consumption
0.85 kVA
Weight
Pump 35 kg
Controller 9 kg
EdwardsŽ vacuum turbo pumps - STPA1603C turbomolecular pump
Ordering information
Product description Part No.
STP pump is supplied with an inlet screen.
For a complete installation order an STP pump, a controller, a
connection cable and power cable from the information below.
STPA1603C
ISO200F B75100010
DN200CF B75100100
Controller
200-240 V 50/60 Hz RS232C PT56Z0Z00
Connection cables
Straight connector
3 m B75130050
5 m B75130020
10 m B75130060
Power cable
Ring terminal 5 m PT46Y0A01
Ring terminal 10 m PT46Y0A10
TMS system is available for this model. For a complete installation
order an STP pump (TMS), a controller, a TMS connection cable
kit, a connection cable, and power cable is required.
STPA1603CV (TMS)
ISO200F PT4616004
DN2000CF PT4616005
TMS connection cable kit
5 m PT461V000
10 m PT461V001
15 m PT461V002
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