Edwardsź Vacuum - Turbo pumps
and accessories
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Vacuum: TIC turbo controller
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combined outfits
Edwards
EXPT 1 &2 pumping stations
STP magnetically levitated turbomolecular
pumps and accessories
Edwards
Vacuum - STP turbo pumps
STP-XA4503C
turbomolecular pump
STP-iX455
turbomolecular pump
STP301/STP301C
turbomolecular pump
STP-L301/STP-L301C
turbomolecular pump
STP603/STP603C
turbomolecular pump
STP1003/STP1003C
turbomolecular pump
STPH301C
high performance turbo pump
STPH451C
high performance turbo pump
STPA803C
"advantage" turbo pump
STPA1303C
"advantage" turbo pump
STPA1603C
turbomolecular pump
STPA2203C
"advantage" turbo pump
STP-XA2703C
turbo pump
STP-XA3203C
turbo pump
Edwardsź turbo molecular
pumps (turbo vacuum pumps) overview, information and definitions
A turbomolecular pump
(TMP)
A compound molecular
pump (CMP)
Turbo vacuum
pumps - pumping speed
Turbo
vacuum pumps - quiescent electrical power
Turbo vacuum
pumps - compression ratio
Turbo vacuum
pumps - ultimate pressure
Turbo
vacuum pumps - bearing and suspension
Turbo vacuum pumps - rotor
Turbo vacuum pumps - motor
Turbo
vacuum pumps - corrosive applications
Turbo vacuum pumps -
purge port
Turbo vacuum pumps -
venting
Turbo
vacuum pumps - inlet screen
Turbo
vacuum pumps - cooling
Turbo vacuum
pumps - scope of supply | Edwardsź Vacuum turbo pumps - STPA1303C "advantage" turbomolecular pump
- Edwardsź STPA1303C
- turbomolecular pump designed for use in semiconductor applications.
- Advanced rotor technology gives class-leading performance for maximum process flexibility.
- STPA1303C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Edwardsź Vacuum turbo pumps - STPA1303C "advantage" turbomolecular pump
Technical Specifications - Features
- Advanced rotor technology
- Maximized process flexibility
- Harsh process compatible
- Advanced controller design
- Self diagnostic functions
- Compact design
Edwardsź Vacuum turbo pumps - STPA1303C "advantage" turbomolecular pump
L type connector
A Polarizing groove
B Outlet port
C Polarizing boss
Edwardsź Vacuum turbo pumps - STPA1303C "advantage" turbomolecular pump
Speed and power curves
Edwardsź Vacuum turbo pumps - STPA1303C "advantage" turbomolecular pump
Dimensions
![Edwards Vacuum turbo pumps - STPA1303C \"advantage\" turbomolecular pump](/images/edwards-turbo-vacuum/STPA1303C-dim.jpg "Edwards Vacuum turbo pumps - STPA1303C \\"advantage\\" turbomolecular pump") A Electrical connector
B Outlet port
C Purge port
Edwardsź Vacuum turbo pumps - STPA1303C "advantage" turbomolecular pump
Controller
![Edwards Vacuum turbo pumps - STPA1303C \"advantage\" turbomolecular pump](/images/edwards-turbo-vacuum/STPA1303C-controller.jpg "Edwards Vacuum turbo pumps - STPA1303C \\"advantage\\" turbomolecular pump")
Edwardsź Vacuum turbo pumps - STPA1303C "advantage" turbomolecular pump
Technical data
Inlet flange
ISO200F / DN200CF
Outlet port
KF40
Purge port
KF10
Water cooling fitting
PT1/4
Pumping speed
N2 1300 l s-1
H2 800 l s-1
Compression ratio
N2 >108
H2 103
Ultimate pressure with bake out heating
10-7 (10-9) order Pa (Torr)
Maximum continuous outlet pressure*
270 (2) Pa (Torr)
Maximum Nitrogen throughput*
1500 sccm
Rated speed
32500 rpm
Starting time
7 min
Maximum inlet flange temperature
120 șC
Input voltage
200 240 V a.c. (±10%)
Power consumption (continuous)
0.85 kVA
Weight
Pump 39 kg
Controller 9 kg
* Water cooled
Edwardsź Vacuum turbo pumps - STPA1303C "advantage" turbomolecular pump
Part information
Product description Part No.
STP pump is supplied with an inlet screen.
For a complete installation order an STP pump, a controller, a
connection cable and power cable from the information below.
STPA1303C
ISO200F inlet B71802020
DN200CF inlet B71803000
Controller
200-240 V 50/60 Hz RS232C PT56Z0Z00
Connection cables
Straight connector
3 m B75130050
5 m B75130020
10 m B75130060
Power cable
Ring terminal 5 m PT46Y0A01
Ring terminal 10 m PT46Y0A10
TMS system is available for this model. For a complete installation
order an STP pump (TMS), a controller, a TMS connection cable
kit, a connection cable, and power cable is required.
STPA1303CV (TMS)
ISO200F PT3626005
DN2000CF PT3626004
TMS connection cable kit
5 m PT330V000
10 m PT330V001
15 m PT330V002
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