Edwards® Vacuum - Turbo pumps
and accessories
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EXT255DX compound turbomolecular pump
EXT255H compound turbomolecular pump
EXT406PX compound turbomolecular pump
EXT556H compound turbomolecular pump
Turbomolecular pump controllers
Edwards Vacuum: EXC
controllers
Edwards
Vacuum: TIC turbo controller
Edwards:
TIC turbo & instrument controller
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cable
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purge-restrictor
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spares
EXPT
combined outfits
Edwards
EXPT 1 &2 pumping stations
STP magnetically levitated turbomolecular
pumps and accessories
Edwards
Vacuum - STP turbo pumps
STP-XA4503C
turbomolecular pump
STP-iX455
turbomolecular pump
STP301/STP301C
turbomolecular pump
STP-L301/STP-L301C
turbomolecular pump
STP603/STP603C
turbomolecular pump
STP1003/STP1003C
turbomolecular pump
STPH301C
high performance turbo pump
STP-L301/STP-L301C
turbomolecular pump
STPH451C
high performance turbo pump
STPA803C
"advantage" turbo pump
STPA1303C
"advantage" turbo pump
STPA1603C
turbomolecular pump
STPA2203C
"advantage" turbo pump
STP-XA2703C
turbo pump
STP-XA3203C
turbo pump
Edwards® turbo molecular
pumps (turbo vacuum pumps) overview, information and definitions
A turbomolecular pump
(TMP)
A compound molecular
pump (CMP)
Turbo vacuum
pumps - pumping speed
Turbo
vacuum pumps - quiescent electrical power
Turbo vacuum
pumps - compression ratio
Turbo vacuum
pumps - ultimate pressure
Turbo
vacuum pumps - bearing and suspension
Turbo vacuum pumps - rotor
Turbo vacuum pumps - motor
Turbo
vacuum pumps - corrosive applications
Turbo vacuum pumps -
purge port
Turbo vacuum pumps -
venting
Turbo
vacuum pumps - inlet screen
Turbo
vacuum pumps - cooling
Turbo vacuum
pumps - scope of supply | Edwards® Vacuum STP603/STP603C turbomolecular pump
- Edwards®STP603
- corrosion resistant STP-603C
- for use in electron microscopes and semiconductor applications
- Edwards® rotor technology
- STP301 has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic media industries.
Edwards® Vacuum STP603/STP603C turbomolecular pump
Features & benefits
- Advanced rotor technology
- Maximized process flexibility
- Maintenance free
- • Harsh process compatible (C version)
- Increased life
- Advanced controller design
- Self diagnostic functions
- Compact design
Edwards® Vacuum STP603/STP603C turbomolecular pump
Pumping speed
(pumping speed vs inlet pressure)
Edwards® Vacuum STP603/STP603C turbomolecular pump
Compression ratio
(compression ration CR vs backing pressure)
Edwards® Vacuum STP603/STP603C turbomolecular pump
Dimensions
A Electrical connectors for control unit
B Outlet flange
C Purge port (C version only)
Edwards® Vacuum STP603/STP603C turbomolecular pump
Controller
Edwards® Vacuum STP603/STP603C turbomolecular pump
L type connector
Edwards® Vacuum STP603/STP603C turbomolecular pump
Technical data
Inlet flange: ISO100 / DN100CF
Outlet port: KF40
Purge port: KF10 (C version only)
Pumping speed
N2: 650 l s-1
H2: 550 l s-1
Compression ratio
N2: >108
H2: >105
Ultimate pressure with bake out
heating
ISO inlet flange: 10-7 (10-9) order Pa (Torr)
CF inlet flange: (not C version) 10-8 (10-10) order Pa (Torr)
CF inlet flange: (C version only) 6.5 x 10-6 (5 x 10-8) Pa (Torr)
Maximum allowable inlet pressure
Maximum continuous outlet pressure
Ambient cooled: 13 (0.1) Pa (Torr)
Rated speed: 35000 rpm
Starting time: 6min
Maximum inlet flange temperature: 120 ºC
Input voltage: 100 to 120 V a.c. (±10%) or 200 to 240 V a.c. (±10%)
Power consumption
Start up: 0.8 kVA
Weight
Pump 31 kg
Controller 9 kg
Edwards® Vacuum STP301/STP301C turbomolecular pump
Part information
Product description Part No.
STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below.
STP603
ISO160F B72102010
DN160CF PT390Z005
STP603C
ISO160F B72102020
DN160CF PT39AZ002
Controller
100 V-120 V/200-240 V 50/60 Hz RS232C PT56Z0Z00
Connection cables
Straight connector
3 m B75130050
5 m B75130020
10 m B75130060
Power cables
Ring terminal 5 m PT46Y0A01
Ring terminal 10 m PT46Y0A10
Option
Water cooling coil
Horizontal fitting RC1/4 B72132020
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