Edwards® Vacuum - Turbo pumps and accessories
EXT turbomolecular pumps
EXT75DX compound turbomolecular pump
EXT255DX compound turbomolecular pump
EXT255H compound turbomolecular pump
EXT406PX compound turbomolecular pump
EXT556H compound turbomolecular pump
Turbomolecular pump controllers
Edwards Vacuum: EXC controllers
Edwards Vacuum: TIC turbo controller
Edwards: TIC turbo & instrument controller
EXT accessories
Edwards EXT accessories
EXT pump to controller cable
EXT ACX air-cooler
EXT BX bakeout band
EXT PRX10 purge-restrictor
EXT TAV vent-valve
EXT Vent-port adaptor
EXT Vibration isolator
EXT VRX vent-restrictor
EXT turbo pump spares
EXPT combined outfits
Edwards EXPT 1 &2 pumping stations
STP magnetically levitated turbomolecular pumps and accessories
Edwards Vacuum - STP turbo pumps
STP-XA4503C turbomolecular pump
STP-iX455 turbomolecular pump
STP301/STP301C turbomolecular pump
STP-L301/STP-L301C turbomolecular pump
STP603/STP603C turbomolecular pump
STP1003/STP1003C turbomolecular pump
STPH301C high performance turbo pump
STPH451C high performance turbo pump
STPA803C "advantage" turbo pump
STPA1303C "advantage" turbo pump
STPA1603C turbomolecular pump
STPA2203C "advantage" turbo pump
STP-XA2703C turbo pump
STP-XA3203C turbo pump
Edwards® turbo molecular pumps (turbo vacuum pumps) overview, information and definitions
A turbomolecular pump (TMP)
A compound molecular pump (CMP)
Turbo vacuum pumps - pumping speed
Turbo vacuum pumps - quiescent electrical power
Turbo vacuum pumps - compression ratio
Turbo vacuum pumps - ultimate pressure
Turbo vacuum pumps - bearing and suspension
Turbo vacuum pumps - rotor
Turbo vacuum pumps - motor
Turbo vacuum pumps - corrosive applications
Turbo vacuum pumps - purge port
Turbo vacuum pumps - venting
Turbo vacuum pumps - inlet screen
Turbo vacuum pumps - cooling
Turbo vacuum pumps - scope of supply | Edwards® STP magnetically levitated turbomolecular pumps- Advanced materials and design for:
- Class leading performance
- The broad product range covers all potential turbo pump applications.
- Qualified by all major semiconductor OEM’s
- Used in all major semiconductor fabrication plants
- Installed base of over 80000 units, 85% in the semiconductor industry
Edwards® STP magnetically levitated turbomolecular pumps - Key features- Multi-axis magnetic bearing system
- High Throughput versions for high flow processes
- Low vibration characteristics
- Advanced controller technology
- Full interfacing capability
Edwards® STP magnetically levitated turbomolecular pumps - Technical Specifications - Features
- Improved pumping performance
- Optimized for semiconductor process pressures
- Maximized gas throughput for each flange size
- Applications specific models
- New generation universal controllers
- Compact (1/2 rack) controller
- Auto tune enabling "mix and match" pumps
- High power d.c. motor drive
Edwards® is a leader in clean and dry vacuum technology. The first STP pumps were sold in 1983 and there are now over 80000 installations worldwide. 85% are operating on semiconductor process tools where they demonstrate exceptional levels of reliability. STP pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.
- Proven reliability.
- Clean oil-free high vacuum.
- Complete range from 300 to 4500 l s-1.
- Application specific models.
- Very low noise and vibration.
- Low cost of ownership.
- Virtually maintenance free.Installation in any orientation.
- Full remote control interface.
- •Supported globally by Edwards
Proven magnetic bearing technology
The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance.
Edwards® STP range
Edwards® UHV series
The Edwards® Ultra High Vacuum series of magnetically levitated turbo molecular pumps are the products of choice for the semiconductor, surface science or high energy physics industries. They offer unrivalled reliability, performance, cleanliness and class leading low vibration levels. The pumps are all d.c. powered, eliminating the need for batteries, they use a half rack controller which features auto-tuning and advanced diagnostic features. The range contains pumps with speeds from 300 l s-1 to 1000 l s-1 all of which are available in ISO or CF flange variants.
Edwards® High throughput series
The high throughput series of magnetically levitated turbo pumps generate the high gas flows required by the current generation of semiconductor etch, ion implant and LCD systems. All the pumps feature a five active axis magnetic bearing system and a d.c. drive for increased robustness and stability. They use a Holweck stage to provide advanced throughput performance. They operate via a half rack controller with auto-tuning, advanced diagnostics and an integrated temperature management system The range operates with throughput speeds from 300 l s-1 to 1300 l s-1.
Edwards® Advantage series
The new Edwards®Advantage series of magnetically levitated turbo pumps have been designed to provide the highest levels of throughput required by the next generation of semiconductor etch and CVD processes. They have been developed, using continuous improvement techniques, from the ultra reliable, high performance H series of products. Their advanced rotor design combined with selection of the best materials has allowed the creation of the next generation of high throughput turbo pump inside the same footprint as many of the existing models. The range contains pumps with throughput speeds from 800 l s-1 to 4500 l s-1.
Edwards® STP features
Edwards® Oil free
All Edwards® STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in the semiconductor industry (where device densities are constantly increasing) and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).
Maintenance free
Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.
Vibration free
Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peak-to-peak vibration level is less than 0.02 µm. This amplitude remains constant throughout the life of the pump and is free from troublesome sub-harmonics.
Vibration analysis STP300 displacement/frequency
Edwards® STP magnetically levitated turbomolecular pumps - ApplicationSemiconductor fabrication
Edwards® STP turbomolecular pumps are the number one choice for the world’s leading semiconductor etch and implant manufacturers. The pumps are installed on the harshest applications (for example, metal etch) and demonstrate exceptional levels of reliability.
- Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
- Electron cyclotron resonance (ECR) etch
- Film deposition CVD, PECVD, ECRCVD, MOCVD
- Sputtering
- Ion implantation source, beam line pumping end station
- MBE
- Diffusion
- Photo resist stripping
- Crystal/epitaxial growth
- Wafer inspection
- Load lock chambers
Scientific applications
Edwards® STP pumps are used extensively in the world’s foremost research and development institutes. The pumps satisfy stringent performance criteria and reliability expectations. They are also used in the following applications:
- Scientific instruments: surface analysis, mass spectrometry, electron microscopy
- High energy physics: beam lines, accelerators
- Radioactive applications: fusion systems, cyclotrons
Data summary - Edwards® STP magnetically levitated turbomolecular pumpsEdwards® STP-XA4503C turbomolecular pumpEdwards STP-XA4503C turbomolecular pump
Pumping speed l s-1:
N2: 3800/4000/4300
H2: 2500 Inlet flange: VG300/ISO320F/VG350
Ultimate pressure with bake
out heating Pa (Torr):ISO: 10-7 (10-9) order
CF (not C version):
CF (C version only): Rated speed: 24,000
Control unit:
Edwards® STP-iX455 turbomolecular pump
Pumping speed l s-1:
N2: 300/450
H2: 300/460
Inlet flange: ISO100K/DN100CF/ISO160K/DN1600CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO:10-8 DN Flange
CF (not C version):10-6 ISO Flange
CF (C version only):
Rated speed:
Control unit:
Edwards® STP301 - STP301C turbomolecular pumpPumping speed l s-1:
N2: 300
H2:300
Inlet flange: ISO100/DN100CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 6.5 x 10-6 (5 x 10-8)
CF (not C version):10-8 (10-10) order
CF (C version only): 10-7 (10-9) order
Rated speed: 48,000
Control unit: SCU-301/451
Edwards® STP-L301 - STP-L301C turbomolecular pumpEdwards STP-L301/STP-L301C turbomolecular pump
Pumping speed l s-1:
N2: 260
H2: 290
Inlet flange: ISO100/DN100CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-6 (108) order
CF (not C version):
CF (C version only):
Rated speed: 48,000
Control unit: SCU-301/451
Edwards® STP603 - STP603C turbomolecular pumpPumping speed l s-1:Edwards STP603/STP603C turbomolecular pump
Pumping speed l s-1:
N2: 650
H2: 550
Inlet flange: ISO160F/DN160CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9) order
CF (not C version): 10-8 (10-10) order
CF (C version only): 6.5 x 10-6 (5 x 10-8)
Rated speed: 35,000
Control unit: SCU-750
Edwards® STP1003 - STP1003C turbomolecular pumpEdwards STP1003/STP1003C turbomolecular pump
Pumping speed l s-1:
N2: 1000
H2: 800
Inlet flange: ISO200F/DN200CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9) order
CF (not C version): 10-8 (10-10) order
CF (C version only): 6.5 x 10-6 (5 x 10-8)
Rated speed: 35,000
Control unit:SCU-750
Edwards® STPH301C turbomolecular pumpEdwards STPH301C high performance turbo pump
Pumping speed l s-1:
N2: 300
H2: 200
Inlet flange: ISO100K/DN100CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9) order
CF (not C version):
CF (C version only):
Rated speed: 48,000
Control unit: SCU-750
Edwards® STPH451C turbomolecular pumpEdwards STPH451C high performance turbo pump
Pumping speed l s-1:
N2: 450
H2: 300
Inlet flange: ISO160K/DN160CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9)order
CF (not C version):
CF (C version only):
Rated speed: 48,000
Control unit:SCU-750
Edwards® STPA803C turbomolecular pumpEdwards STPA803C "advantage" turbo pump
Pumping speed l s-1:
N2: 800
H2: 520
Inlet flange: ISO160F/DN160CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9) order
CF (not C version):
CF (C version only):
Rated speed: 32,500
Control unit: SCU-750
Edwards® STPA1303C turbomolecular pumpEdwards STPA1303C "advantage" turbo pump
Pumping speed l s-1:
N2: 1300
H2: 800
Inlet flange: ISO200F/DN200CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9) order
CF (not C version):
CF (C version only):
Rated speed: 32,500
Control unit:SCU-750
Edwards® STPA1603C turbomolecular pumpEdwards STPA1603C turbomolecular pump
Pumping speed l s-1:
N2: 1600
H2: 1200
Inlet flange: ISO200F/DN200CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7
CF (not C version):
CF (C version only):
Rated speed: 36,500
Control unit: SCU-750
Edwards® STPA2203C turbomolecular pumpEdwards STPA2203C "advantage" turbo pump
Pumping speed l s-1:
N2: 2200
H2: 1700
Inlet flange: ISO250F/ICF305
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-6 (10-8)order
CF (not C version):
CF (C version only):
Rated speed: 27,000
Control unit: SCU-1500
Edwards® STP-XA2703C turbomolecular pumpEdwards STP-XA2703C turbo pump
Pumping speed l s-1:
N2: 2650
H2: 2050
Inlet flange: ISO250F/VG250
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 order
CF (not C version):
CF (C version only):
Rated speed: 27,500
Control unit: SCU-1500
Edwards® STP-XA3203C turbomolecular pumpEdwards STP-XA3203C turbo pump
Pumping speed l s-1:
N2: 3200
H2: 2300
Inlet flange: ISO320F/VG300
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 order
CF (not C version):
CF (C version only):
Rated speed: 27,500
Control unit: SCU-1500
Edwards® SCU750 control unit turbomolecular pump Control unit
Magnetic bearing control system: Digital control
Input voltage:
AC100 . 100-120
± 10% V a.c./AC200
200-240 ± 10% V a.c.
Power consumption VA
Without TMS: Max 850
With TMS: Max 1200
Input frequency Hz: 50/60 ± 2
Leak current mA: Max 3.5
Input phase:
Main breaker rated current A: 10
Motor driving system: Three phase DC brush less motor driver
Allowable ambient temperature °C: 0 . 40
Storage temperature °C: -25 . 55
Mass kg: 8.5
TMS control unit: Built in
Serial communication function: - RS232: Standard RS485: Standard Panel display: LCD (20 characters, 2 lines)
Edwards® SCU-1500 control unit turbomolecular pump Control unit
Magnetic bearing control system: Digital control
Input Voltage: 200 to 240 ± 10% V a.c.
Power consumption VA
Without TMS: 1500
With TMS: 2100
Input frequency Hz: 50/60 ± 2
Leak current mA: Max 3.5
Input phase: Single Phase
Main breaker rated current A: 15
Motor driving system: Three phase DC brush less motor driver
Allowable ambient temperature °C: 0 to 40
Storage temperature °C: -25 to 55
Mass kg: 12
TMS control unit: Built in
Serial communication function:
RS232: Standard
RS485: Standard
Panel display: -
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