Edwards® Vacuum - Turbo pumps and accessories
EXT turbomolecular pumps
EXT75DX compound turbomolecular pump
EXT255DX compound turbomolecular pump
EXT255H compound turbomolecular pump
EXT406PX compound turbomolecular pump
EXT556H compound turbomolecular pump
Turbomolecular pump controllers
Edwards Vacuum: EXC controllers
Edwards Vacuum: TIC turbo controller
Edwards: TIC turbo & instrument controller
EXT accessories
Edwards EXT accessories
EXT pump to controller cable
EXT ACX air-cooler
EXT BX bakeout band
EXT PRX10 purge-restrictor
EXT TAV vent-valve
EXT Vent-port adaptor
EXT Vibration isolator
EXT VRX vent-restrictor
EXT turbo pump spares
EXPT combined outfits
Edwards EXPT 1 &2 pumping stations
STP magnetically levitated turbomolecular pumps and accessories
Edwards Vacuum - STP turbo pumps
STP-XA4503C turbomolecular pump
STP-iX455 turbomolecular pump
STP301/STP301C turbomolecular pump
STP-L301/STP-L301C turbomolecular pump
STP603/STP603C turbomolecular pump
STP1003/STP1003C turbomolecular pump
STPH301C high performance turbo pump
STPH451C high performance turbo pump
STPA803C "advantage" turbo pump
STPA1303C "advantage" turbo pump
STPA1603C turbomolecular pump
STPA2203C "advantage" turbo pump
STP-XA2703C turbo pump
STP-XA3203C turbo pump
Edwards® turbo molecular pumps (turbo vacuum pumps) overview, information and definitions
A turbomolecular pump (TMP)
A compound molecular pump (CMP)
Turbo vacuum pumps - pumping speed
Turbo vacuum pumps - quiescent electrical power
Turbo vacuum pumps - compression ratio
Turbo vacuum pumps - ultimate pressure
Turbo vacuum pumps - bearing and suspension
Turbo vacuum pumps - rotor
Turbo vacuum pumps - motor
Turbo vacuum pumps - corrosive applications
Turbo vacuum pumps - purge port
Turbo vacuum pumps - venting
Turbo vacuum pumps - inlet screen
Turbo vacuum pumps - cooling
Turbo vacuum pumps - scope of supply | Edwards® Vacuum turbo pumps - STP-XA3203C turbomolecular pump- STP-XA3203C turbo pump
- High performance in the process range of high vacuum to 2300 sccm process flow
- Enhanced throughput for all gases
- Pump is based on a new platform design offering features to improve thermal management
- Enhances performance on harsh processes
- Increases the maximum process flow capability
- Reduces the effects of corrosion and deposition
- Outstanding performance is suited to both light and harsh applications, such as semiconductor etch, implant, lithography and LCD processes.
Edwards® Vacuum turbo pumps - STP-XA3203C turbomolecular pump
Features & benefits
- Advanced rotor design
- • Increased H2, N2 and Ar performance
- • Improved performance in the process pressure range of high vacuum
- to 2300 sccm
- • Maintenance free
- 5-axis magnetic suspension system
- • Zero contamination
- • Low vibration
- Innovative torque management
- • Patended torque reduction mechanism
- Optimized temperature management
- • High temperature TMS capability
- • Low deposition
- • Built-in cooling mechanism
- • Higher gas throughput heated and unheated
- • Optimized life
- • Harsh process compatible
- Certifications
- • SEMI® compliant, CE Marked and UL Listed
Edwards® Vacuum turbo pumps - STP-XA3203C turbomolecular pump
L type connector
A Polarizing groove
B Outlet port
C Polarizing boss
Edwards® Vacuum turbo pumps - STP-XA3203C turbomolecular pump
Speed and power curves
Edwards® Vacuum turbo pumps - STP-XA3203C turbomolecular pump
Dimensions
A Temperature Management System (TMS) sensor
B TMS Heater*
C TMS Heater Cover* F Purge port KF10
D Outlet port KF40
E Cooling water port Rc 1/4 ISO
* TMS spec only
Edwards® Vacuum turbo pumps - STP-XA3203C turbomolecular pump
Controller
Edwards® Vacuum turbo pumps - STP-XA3203C turbomolecular pump
Technical data
Inlet flange
ISO320F / VG300
Pumping speed
N2 3200 l s-1
H2 2300 l s-1
Compression ratio
N2 >108
H2 6 x 103
Ultimate pressure
10-7 order Pa
Maximum allowable backing pressure
266 Pa
Maximum allowable gas flow
N2 (water cooled only) 2300 (3.8) sccm (Pa m3/s)
Ar (water cooled only) 1900 (3.2) sccm (Pa m3/s)
Rated speed
27500 rpm
Starting time
8 min
Mounting position
Any orientation
Water cooling
Flow
3 l min
Temperature
5-25 (41-77) °C (°F)
Pressure
0.3 MPa
Recommended purge gas flow
50 (8.4 x 10-2) sccm (Pa m3/s)
Input voltage
200 – 240 +/-10%
Typical power consumption
1.5 kVA
Weight
Pump 80 (176) kg (lb)
Controller 12 (26.4) kg (lb)
Edwards® Vacuum turbo pumps - STP-XA3203C turbomolecular pump
Part information
Product description Part No.
STP pump is supplied with an inlet screen.
For a complete installation order an STP pump, a controller, a
connection cable and power cable from the information below.
STP-XA3203C
ISO320F PT660Z050
VG300 PT660Z150
DN320CF PT660Z080
Controller
200-240 V, 50/60 Hz with RS232C PT59Z0Z00
Connection cables
Straight connector
3 m B75030030
5 m B75030010
10 m B75030040
Power cables
Ring terminal 5 m B75030020
Ring terminal 10 m PT35Y0A00
|
