Edwards® Vacuum - Turbo pumps and accessories
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EXT75DX compound turbomolecular pump
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EXT406PX compound turbomolecular pump
EXT556H compound turbomolecular pump
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Edwards Vacuum: EXC controllers
Edwards Vacuum: TIC turbo controller
Edwards: TIC turbo & instrument controller
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Edwards EXPT 1 &2 pumping stations
STP magnetically levitated turbomolecular pumps and accessories
Edwards Vacuum - STP turbo pumps
STP-XA4503C turbomolecular pump
STP-iX455 turbomolecular pump
STP301/STP301C turbomolecular pump
STP-L301/STP-L301C turbomolecular pump
STP603/STP603C turbomolecular pump
STP1003/STP1003C turbomolecular pump
STPH301C high performance turbo pump
STPH451C high performance turbo pump
STPA803C "advantage" turbo pump
STPA1303C "advantage" turbo pump
STPA1603C turbomolecular pump
STPA2203C "advantage" turbo pump
STP-XA2703C turbo pump
STP-XA3203C turbo pump
Edwards® turbo molecular pumps (turbo vacuum pumps) overview, information and definitions
A turbomolecular pump (TMP)
A compound molecular pump (CMP)
Turbo vacuum pumps - pumping speed
Turbo vacuum pumps - quiescent electrical power
Turbo vacuum pumps - compression ratio
Turbo vacuum pumps - ultimate pressure
Turbo vacuum pumps - bearing and suspension
Turbo vacuum pumps - rotor
Turbo vacuum pumps - motor
Turbo vacuum pumps - corrosive applications
Turbo vacuum pumps - purge port
Turbo vacuum pumps - venting
Turbo vacuum pumps - inlet screen
Turbo vacuum pumps - cooling
Turbo vacuum pumps - scope of supply | Edwards® Vacuum turbo pumps - STP-XA2703C turbomolecular pump
- STP-XA2703C turbo pump
- High performance in the process range of high vacuum to 2300 sccm process flow
- Enhanced throughput for all gases
- Pump is based on a new platform design offering features to improve thermal management
- Enhances performance on harsh processes
- Increases the maximum process flow capability
- Reduces the effects of corrosion and deposition
- Outstanding performance is suited to both light and harsh applications, such as semiconductor etch, implant, lithography and LCD processes.
Edwards® Vacuum turbo pumps - STP-XA2703C turbomolecular pump
Features & benefits
- Advanced rotor design
- • Increased H2, N2 and Ar performance
- • Improved performance in the process pressure range of high vacuum
- to 2300 sccm
- • Maintenance free
- 5-axis magnetic suspension system
- • Zero contamination
- • Low vibration
- Innovative torque management
- • Patended torque reduction mechanism
- Optimized temperature management
- • High temperature TMS capability
- • Low deposition
- • Built-in cooling mechanism
- • Higher gas throughput heated and unheated
- • Optimized life
- • Harsh process compatible
- Certifications
- • SEMI® compliant, CE Marked and UL Listed
Edwards® Vacuum turbo pumps - STP-XA2703C turbomolecular pump
L type connector
A Polarizing groove
B Outlet port
C Polarizing boss
Edwards® Vacuum turbo pumps - STP-XA2703C turbomolecular pump
Speed and power curves
Edwards® Vacuum turbo pumps - STP-XA2703C turbomolecular pump
Dimensions
A Temperature Management System (TMS) sensor
B TMS Heater*
C TMS Heater Cover* F Purge port KF10
D Outlet port KF40
E Cooling water port Rc 1/4 ISO
* TMS spec only
Edwards® Vacuum turbo pumps - STP-XA2703C turbomolecular pump
Controller
Edwards® Vacuum turbo pumps - STP-XA2703C turbomolecular pump
Technical data
Inlet flange
ISO250F / VG250
Pumping speed
N2 2650 l s-1
H2 2050 l s-1
Compression ratio
N2 >108
H2 6 x 103
Ultimate pressure
10-7 order Pa
Maximum allowable backing pressure
266 Pa
Maximum allowable gas flow
N2 (water cooled only) 2300 (3.8) sccm (Pa m3/s)
Ar (water cooled only) 1900 (3.2) sccm (Pa m3/s)
Rated speed
27500 rpm
Starting time
8 min
Mounting position
Any orientation
Water cooling
Flow 3 l min
Temperature
5-25 (41-77) °C (°F)
Pressure
0.3 MPa
Recommended purge gas flow
50 (8.4 x 10-2) sccm (Pa m3/s)
Input voltage
200 – 240 +/-10%
Typical power consumption
1.5 kVA
Weight
Pump 75 (165) kg (lb)
Controller 12 (26.4) kg (lb)
Edwards® Vacuum turbo pumps - STP-XA2703C turbomolecular pump
Part information
Product description Part No.
STP pump is supplied with an inlet screen.
For a complete installation order an STP pump, a controller, a
connection cable and power cable from the information below.
STP-XA2703C
ISO250 PT660Z140
VG250 PT660Z110
DN250CF PT6610010
Controller
200-240 V, 50/60 Hz with RS232C PT59Z0Z00
Connection cables
Straight connector
3 m B75030030
5 m B75030010
10 m B75030040
Power cables
Ring terminal 5 m B75030020
Ring terminal 10 m PT35Y0A00
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